Skhynix Inc.

Seoul National University

Yoo-Hyun Noh

Jong-Ho Lee

Young-Soo Ahn

Jong-Moo Choi

A nonvolatile memory device includes a gate line extending in a first horizontal direction; a gate electrode of a pillar shape extending in a vertical direction from the gate line; a plurality of bit lines and a plurality of source lines extending in parallel in a second horizontal direction perpendicular to the first horizontal direction, the plurality of bit lines and the plurality of source lines being stacked in the vertical direction; and a plurality of cell transistors vertically stacked to surround an outer side surface of the gate electrode between the plurality of bit lines and the plurality of source lines. Each of the cell transistors includes a gate dielectric layer which surrounds the outer side surface of the gate electrode and a channel layer which surrounds an outer side surface of the gate dielectric layer.

Nonvolatile memory device having stacked cell transistors and operating method thereof

A method for fabricating a nonvolatile memory device includes forming a stacked structure over a substrate defining a cell area and a peripheral area and having a source region, the stacked structure including interlayer dielectric layers and sacrifice layers, forming channel layers connected to the substrate through the stacked structure of the cell area, forming a first slit in the stacked structure of the cell area, forming a second slit in the stacked structure, the second slit including a first portion and a second portion, removing the sacrifice layers exposed through the first and second slits, forming conductive layers to fill spaces from which the sacrifice layers are removed, forming an insulating layer in the second slit, and forming a source contact by burying a conductive material in the first portion of the second slit having the insulating layer formed therein.

Nonvolatile memory device and method for fabricating the same

A non-volatile memory device includes a first string and a second string that each include a first drain selection transistor, a second drain selection transistor, a plurality of memory cells, and a source selection transistor that are coupled in series in that order, respectively, a first bit line coupled with a node between the first and second drain selection transistors of the first string, and a second bit line coupled with an end node of the second string on the side of the first drain selection transistor of the second string, wherein gates of the first drain selection transistors of the first and second strings are coupled with each other, and gates of the second drain selection transistors of the first and second strings are coupled with each other.

Non-volatile memory device, method for fabricating the same, and method for operating the same

A nonvolatile memory device includes a plurality of channel structures formed over a substrate and including a plurality of interlayer dielectric layers alternately stacked with a plurality of channel layers; first and second vertical gates alternately disposed between the channel structures along one direction crossing with the channel structure and adjoining the plurality of channel layers with a memory layer interposed therebetween; and a pair of first and second word lines disposed over or under the channel structures and extending along the one direction in such a way as to overlap with the first and second vertical gates. The first word line is connected with the first vertical gates and the second word line is connected with the second vertical gates.

Growing community of inventors

Gyeonggi-do, South Korea

Yoo-Hyun Noh