Texas Instruments Corporation

Yongxi Zhang

Sameer P Pendharkar

Seetharaman Sridhar

Scott Balster

Philip Leland Hower

Guru Mathur

John Lin

Henry Litzmann Edwards

Marie Denison

Constantin Bulucea

Filippo Marino

Salvatore Giombanco

Zachary K Lee

Eugen Mindricelu

Victor Samuel Sinow

A semiconductor device includes at least a first transistor including at least a second level metal layer (second metal layer) above a first level metal layer coupled by a source contact to a source region doped with a first dopant type. The second level metal layer is coupled by a drain contact to a drain region doped with the first dopant type. A gate stack is between the source region and drain region having the second level metal layer coupled by a contact thereto. The second level metal layer is coupled by a contact to a first isolation region doped with the second dopant type. The source region and drain region are within the first isolation region. A second isolation region doped with the first dopant type encloses the first isolation region, and is not coupled to the second level metal layer so that it electrically floats.

Transistor having double isolation with one floating isolation

An integrated circuit chip includes a bimodal power N-P-Laterally Diffused Metal Oxide Semiconductor (LDMOS) device having an N-gate coupled to receive an input signal and a level shifter coupled to receive the input signal and to provide a control signal to a P-gate driver of the N-P-LDMOS device. A method of operating an N-P-LDMOS power device is also disclosed.

Integrated high-side driver for P-N bimodal power device

A semiconductor device contains an LDNMOS transistor with a lateral n-type drain drift region and a p-type RESURF region over the drain drift region. The RESURF region extends to a top surface of a substrate of the semiconductor device. The semiconductor device includes a shunt which is electrically coupled between the RESURF region and a low voltage node of the LDNMOS transistor. The shunt may be a p-type implanted layer in the substrate between the RESURF layer and a body of the LDNMOS transistor, and may be implanted concurrently with the RESURF layer. The shunt may be through an opening in the drain drift region from the RESURF layer to the substrate under the drain drift region. The shunt may be include metal interconnect elements including contacts and metal interconnect lines.

Structures to avoid floating resurf layer in high voltage lateral devices

An integrated circuit is formed on a substrate containing a semiconductor material having a first conductivity type. A deep well having a second, opposite, conductivity type is formed in the semiconductor material of the first conductivity type. A deep isolation trench is formed in the substrate through the deep well so as separate an unused portion of the deep well from a functional portion of the deep well. The functional portion of the deep well contains an active circuit element of the integrated circuit. The separated portion of the deep well does not contain an active circuit element. A contact region having the second conductivity type and a higher average doping density than the deep well is formed in the separated portion of the deep well. The contact region is connected to a voltage terminal of the integrated circuit.

Deep trench isolation with tank contact grounding

RESURF-based dual-gate p-n bimodal conduction laterally diffused metal oxide semiconductors (LDMOS). In an illustrative embodiment, a p-type source is electrically coupled to an n-type drain. A p-type drain is electrically coupled to an n-type source. An n-type layer serves as an n-type conduction channel between the n-type drain and the n-type source. A p-type top layer is disposed at the surface of the substrate of said semiconductor device and is disposed above and adjacent to the n-type layer. The p-type top layer serves as a p-type conduction channel between the p-type source and the p-type drain. An n-gate controls current flow in the n-type conduction channel, and a p-gate controls current flow in the p-type conduction channel.

P-N bimodal transistors

A multi-finger lateral high voltage transistors (MFLHVT) includes a substrate doped a first dopant type, a well doped a second dopant type, and a buried drift layer (BDL) doped first type having a diluted BDL portion (DBDL) including dilution stripes. A semiconductor surface doped the second type is on the BDL. Dielectric isolation regions have gaps defining a first active area in a first gap region (first MOAT) and a second active area in a second gap region (second MOAT). A drain includes drain fingers in the second MOAT interdigitated with source fingers in the first MOAT each doped second type. The DBDL is within a fingertip drift region associated drain fingertips and/or source fingertips between the first and second MOAT. A gate stack is on the semiconductor surface between source and drain. The dilution stripes have stripe widths that increase monotonically with a drift length at their respective positions.

Diluted drift layer with variable stripe widths for power transistors

Structures to avoid floating RESURF layer in high voltage lateral devices

An integrated circuit and method having an LDMOS transistor with multiple current channels. A first current channel is above a buried p-type diffusion and a second one current channel is below the buried p-type diffusion.

High voltage multiple channel LDMOS

An integrated circuit including an isolated device which is isolated with a lower buried layer combined with deep trench isolation. An upper buried layer, with the same conductivity type as the substrate, is disposed over the lower buried layer, so that electrical contact to the lower buried layer is made at a perimeter of the isolated device. The deep trench isolation laterally surrounds the isolated device. Electrical contact to the lower buried layer sufficient to maintain a desired bias to the lower buried layer is made along less than half of the perimeter of the isolated device, between the upper buried layer and the deep trench.

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Plano, TX, United States of America

Yongxi Zhang