Applied Materials, Inc.

Yong Xiang Lim

Juan Carlos Rocha-Alvarez

Jian Li

Kwangduk Douglas Lee

Paul Brillhart

Dmitry A Dzilno

Mayur G Kulkarni

Sanjay G Kamath

Zongbin Wang

Akshay Gunaji

Sandeep Bindgi

Yubin Zhang

Exemplary semiconductor processing systems include a processing chamber, a power supply, and a chuck disposed at least partially within the processing chamber. The chuck includes a chuck body defining a vacuum port. The chuck also includes first and second coplanar electrodes embedded in the chuck body and connected to the power supply. In some examples, coplanar electrodes include concentric electrodes defining a concentric gap in between. Exemplary semiconductor processing methods may include activating the power supply for the electrostatic chuck to secure a semiconductor substrate on the body of the chuck and/or activating the vacuum port defined by the body of the electrostatic chuck. Some processing can be carried out at increased pressure, while other processing can be carried out at reduced pressure with increased chucking voltage.

Multi-pressure bipolar electrostatic chucking

Growing community of inventors

Singapore, Singapore

Yong Xiang Lim