Taiwan Semiconductor Manufacturing Comp. Ltd.

Yong-Sin Chang

Wen-Kung Cheng

Chen-Peng Fan

Ming-Hsien Chen

Yao Hsiang Liang

Chao-Keng Li

Jung-Chen Yang

Richard Chen

Wen-Yu Ho

Labo Chang

A semiconductor structure includes a transistor formed over a substrate. The transistor includes a transistor gate and at least one source/drain region. The semiconductor structure includes a pre-determined region coupled to the transistor. The semiconductor structure further includes a resist protection oxide (RPO) layer formed over the pre-determined region, wherein the RPO layer has a level of nitrogen of about 0.35 atomic % or less.

Image sensor having an RPO layer containing nitrogen

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Taichung, Taiwan

Yong-Sin Chang