Hitachi, Ltd.

Mitsubishi Chemical Corporation

Yoko Ikeda

Hisafumi Iwata

Junko Konishi

Yuji Takagi

Kenji Obara

Ryo Nakagaki

Yasuhiko Ozawa

Seiji Isogai

Makoto Ono

Yasuhiro Yoshitake

Natsuyo Morioka

Kazunori Nemoto

Yoshinori Seki

Takumi Shimamori

A method for classifying defects, including: calculating feature quantifies of defect image which is obtained by imaging a defect on a sample; classifying the defect image into a classified category by using information on the calculated feature quantities; displaying the classified defect image in a region on a display screen which is defined to the classified category; adding information on the classified category to the displayed defect image; transferring the displayed defect image which is added the information on the classified category to one of the other categories and displaying the transferred defect image in a region on the display screen which is defined to the one of the other categories; and changing information on the category.

Inspecting method, inspecting system, and method for manufacturing electronic devices

The present invention has an analyzing unit including an image detection device for producing a plurality of images of a workpiece, a storage for storing detected images produced by the image detection device, and a display having a screen with a first area for displaying a plurality of detected images stored in the storage and a plurality of second areas for classifying the detected images according to features of the detected images, whereby the plurality of detected images are moved on the screen from the first area to selected second areas to classify the plurality of detected images in the second areas.

An inspection system comprises an inspection machine for inspecting a work which is processed in one of the manufacturing processes of a manufacturing line and an analysis system for outputting an inspection history list obtained by making calculations from the inspected result. The inspection history list shows a matrix of first information as the inspection processes in which the work is inspected or the manufacturing processes corresponding to the inspection processes in which the work is inspected and second information as to the works inspected by the inspection machine.

Inspection system and method for manufacturing electronic devices using the inspection system

A magneto-optical recording medium having, in the following order, a substrate, a magneto-optical recording layer having a Curie temperature of not less than 220.degree. C., and a reflective layer mainly composed of Ag and having a refractive index of not more than 0.5 at a wavelength of less than 600 nm is written with an external magnetic field and a laser beam with a wavelength of less than 600 nm while read-out is with the laser beam also at a wavelength less than 600 nm.

Magneto-optical recording medium

Growing community of inventors

Yokohama, Japan

Yoko Ikeda