National Yang Ming Chiao Tung University

Taiwan Semiconductor Manufacturing Comp. Ltd.

Yin-Hao Wu

Wei-I Lee

Yen-Hsien Yeh

Huan-Just Lin

Han-Ting Lin

Sin-Yi Yang

Yu-Feng Yin

An-Shen Chang

Kuei-Ming Chen

Chen-Jung Wang

Jiann-Horng Lin

Hsing-Hsiang Wang

Kun-Yi Li

Lin-Ting Lin

Tzu-Yi Yu

Meng-Chieh Wen

A method for forming a memory device structure is provided. The method includes providing a substrate, a first dielectric layer, a conductive via, a magnetic tunnel junction cell, a first etch stop layer, and a first spacer layer. The substrate has a first region and a second region, the first dielectric layer is over the substrate, the conductive via passes through the first dielectric layer over the first region. The method includes removing the first etch stop layer, which is not covered by the first spacer layer. The method includes removing the first dielectric layer, which is not covered by the first etch stop layer.

Memory device structure and method for forming the same

The invention discloses a smoothing method to decrease bowing of group III nitride semiconductor substrate. The certain face of group III nitride semiconductor substrates is etched under the appropriate etching recipe and time, the certain morphology such as rod-type and other structures are appeared at the certain face. And such structures releases the compressive stresses at these certain faces, resulting in clearly increasing the bowing radius of the group III nitride semiconductor substrates, finally decreasing the bowing phenomenon of the group III nitride semiconductor substrate.

Method for smoothing group III nitride semiconductor substrate

A method for treating the threading dislocation within a GaN-containing semiconductor layer is provided. The method includes a substrate is provided. A GaN-containing semiconductor layer with the threading dislocation is formed on the substrate. An etching process with an etching gas is performed to remove the threading dislocation in the GaN-containing semiconductor layer so as to increase the efficiency for the light emitting device.

Method for treating the dislocation in a GaN-containing semiconductor layer

Growing community of inventors

Taichung, Taiwan

Yin-Hao Wu