National Taipei University of Technology

Industrial Technology Research Institute

Yi-Wei Chang

Liang-Chia Chen

Hau-Wei Wang

Chia-Hung Cho

Kai-Ping Chuang

Shih-Hsuan Kuo

Chao-Nan Chen

Sheng-Han Chen

Yong-Lin Wu

A surface measurement device includes a rotating platform, a motion lever, a measuring module and a control module. The rotating platform rotates an object at a rotating speed. The motion lever is above the rotating platform. The measuring module moves to a variety of measuring positions on the motion lever. When the measuring module is at one of the measuring positions, the measuring module measures the heights of a plurality of sampling points on the surface of the object in a sampling frequency. The control module selectively modifies the rotating speed of the rotating platform or the sampling frequency of the measuring module according to the measuring position of the measuring module to make the distance between the sampling points in at least a region of the surface of the object match a sampling rule.

Surface measurement device and method thereof

A chromatic confocal microscope system and signal process method is provided to utilize a first optical fiber module for modulating a light into a detecting light passing through a chromatic dispersion objective and thereby forming a plurality of chromatic dispersion lights to project onto an object. A second optical fiber module conjugated with the first optical fiber module receives a reflected object light for forming a filtered light, which is split into two filtered lights detected by two color sensing units for generating two sets of RGB intensity signals, wherein one set of RGB intensity signals is adjusted relative to the other set of RGB intensity signals. Then two sets of RGB intensity signals are calculated for obtaining a maximum ratio factor. Finally, according to the maximum ratio factor and a depth relation curve, the surface profile of the object can be reconstructed.

Chromatic confocal microscope system and signal process method of the same

The present invention provides a slit-scan multi-wavelength confocal lens module, utilizing at least two lenses having chromatic aberration for splitting a broadband light into continuously linear spectral lights having different focal length respectively. The present invention utilizes the confocal lens module employing slit-scan confocal principle and chromatic dispersion techniques and the confocal microscopy with optical sectioning ability and high resolution in spectral dispersion to establish a confocal microscopy method and system with long DOF and high resolution, capable of modulating a broadband light to produce the axial chromatic dispersion and focus on different depths toward an object's surface for obtaining the reflected light spectrum from the surface. Thereafter, the spectrum is spatially filtered by a slit and then a peak position with respect to the filtered spectrum along the scanning line is detected by a spectral image sensing unit for generating the sectional profile of the measured surface.

Slit-scan multi-wavelength confocal lens module and slit-scan microscopic system and method using the same

The present invention provides a chromatic confocal microscopic system in which two conjugate fiber modules are spatially configured and employed to conduct a detecting light from a light source and an object light reflected from an object, respectively. By means of the two spatially corresponding fiber modules, the detecting light is projected on the object and the reflected light from the object is entered into the other fiber module. Since each fiber of the fiber module is capable of filtering out the unfocused light and stray lights and allowing the focused light pass therethrough a line slit, thereby minimizing potential interference from light cross talk caused by the overlapped light spots, not only can the present invention obtain the information of surface profile of the object with high vertical measurement resolution, but also achieve high lateral resolution during confocal measurement.

Linear chromatic confocal microscopic system

A method and system for three-dimensional polarization-based confocal microscopy are provided in the present disclosure for analyzing the surface profile of an object. In the present disclosure, a linear-polarizing structured light formed by an optical grating is projected on the object underlying profile measurement. By means of a set of polarizers and steps of shifting the structured light, a series of images with respect to the different image-acquired location associated with the object are obtained using confocal principle. Following this, a plurality of focus indexes respectively corresponding to a plurality of inspected pixels of each image are obtained for forming a focus curve with respect to the measuring depth and obtaining a peak value associated with each depth response curve. Finally, a depth location with respect to the peak value for each depth response curve is obtained for reconstructing the surface profile of the object.

Growing community of inventors

Yilan County, Taiwan

Yi-Wei Chang