Industrial Technology Research Institute

Yi-Ching Chen

Yen-Liang Chen

Kai-Yu Cheng

Yu-Ping Lan

Hsiang-Han Hsu

A system and a method for thickness measurement that comprises providing a first confocal microscope, emitting a first light beam from the first confocal microscope in a first direction, focusing the first beam at a first focal plane, providing a second confocal microscope, emitting a second light beam from the second confocal microscope in a second direction substantially opposed to the first direction, focusing the second beam at a second focal plane, and adjusting the relative position of the first and second microscopes by overlapping the first and second focal planes.

Growing community of inventors

Hsinchu, Taiwan

Yi-Ching Chen