Taiwan Semiconductor Manufacturing Comp. Ltd.

Industrial Technology Research Institute

Yen-Chen Lin

Chia-Hung Chu

Chih-Hsien Hsu

Hong-Hsing Chou

Hu-Wei Lin

Chien-Ming Chen

Chih-Hsiang Lin

Meng-Hsin Chen

Chuh-Yung Chen

Jen-Chun Chiu

Sheng-Lung Chang

Hua-Kuang Teng

Tsung-Cheng Huang

Yuan-Ting Huang

Chi-Jen Hsieh

Jr-Wei Ye

Carolina Poe

Ching-Hsin Chang

Ching-Hsing Chiang

A polyester elastomer is provided, which includes a product of reacting (a) amide oligomer, (b) polyalkylene glycol, and (c) poly(alkylene arylate). (a) Amide oligomer has a chemical structure of or a combination thereof, wherein Ris Calkylene group, Ris Calkylene group, and each of x is independently an integer of 10 to 20. (b) Polyalkylene glycol has a chemical structure of wherein Ris Calkylene group, and y is an integer of 20 to 30. (c) Poly(alkylene arylate) has a chemical structure of or a combination thereof, wherein Ar is Ris Calkylene group, and z is an integer of 1 to 10.

Polyester elastomer

A method includes rotating a wafer at a first speed for a first time duration. The wafer is rotated at a second speed that is lower than the first speed for a second time duration after the first time duration. The wafer is rotated at a third speed that is higher than the second speed for a third time duration after the second time duration. A photoresist is dispensed on the wafer during the first time duration and at least a portion of a time interval that includes the second time duration and the third time duration.

Photoresist coating scheme

A method comprises dispensing a first solvent on a semiconductor substrate; dispensing a first layer of a high-viscosity polymer on the first solvent; dispensing a second solvent on the first layer of high-viscosity polymer; and spinning the semiconductor substrate after dispensing the second solvent, so as to spread the high-viscosity polymer to a periphery of the semiconductor substrate.

Method of applying photoresist to a semiconductor substrate

Growing community of inventors

Hsinchu, Taiwan

Yen-Chen Lin