Nissan Chemical Industries Limited

Brewer Science, Inc.

Yasuhisa Sone

Yoshitane Watanabe

Terry Lowell Brewer

Satoshi Takei

Kiyomi Ema

Ram W Sabnis

Akira Yanagimoto

Edith G Hays

Michael D Stroder

Ken-ichi Mizusawa

Ken-Ichi Mizusawa

Jonathan W Mayo

Robert E Nichols

A composition for forming a gap-filling material for lithography which, as a gap-filling material for lithography superior in planarization ability on a substrate having irregularities such as holes or trenches, causing no intermixing with a resist layer, and having a high dry etching rate as compared with the resist, is used in producing semiconductor devices by a method using the gap-filling material to cover the resist on the substrate having holes having an aspect ratio, defined as height/diameter, of 1 or more to transfer images onto the substrate by utilization of lithographic process, the composition being used to coat the substrate prior to the coating of the resist so as to planarize the substrate surface, and the composition being characterized by containing a polymer solution consisting of a polymer and a solvent.

Composition for forming gap-filling material for lithography

Thermosetting anti-reflective coatings for full-fill dual damascene process

A high optical density, i.e., .gtoreq.3.0, at 1 micron or less film thickness, black matrix is disclosed having improved stability and shelf life as a consequence of admixing Pigment Black 7 and organic dye or dye mixtures on a polyimide polymer vehicle.

High optical density ultra thin organic black matrix system

An organic black matrix having high resistivity (.gtoreq.10.sup.11 ohm/square), high optical density (.gtoreq.2.0) at ultra thin film thicknesses (.ltoreq.1.0 microns) for improved STN and TFT pixel display applications is made possible by combining polyimide/dye solutions and mixed metal oxide pigment dispersions at a weight/weight ratio of dye to pigment of 1:15 to 3:15. The need for low resistivity carbon black, as a replacement for sputtered chrome, is negated.

Ultra thin photolithographically imageable organic black matrix coating

Growing community of inventors

Chiyoda-ku, Japan

Yasuhisa Sone