Future Vision Inc.

Yasuhiko Fukuchi

Hitoshi Inaba

Masaharu Fujino

Masato Kochi

Kazuyoshi Nakajima

The present invention provides a charge neutralizer for accurately irradiating a soft X ray into a narrow gap after a glass substrate is lifted up. A soft X ray is introduced into a gap 'd' from a soft X ray charge neutralizer, and the soft X ray is detected by a soft X ray optical axis monitor. Mounting position adjusting meansis adjusted by a detection output from said soft X ray optical axis monitor, and optical axis alignment is performed. Next, according to information from a database, a control unitcontrols gap adjusting means, and charge neutralization is performed. Charge neutralization can also be performed by controlling the gap 'd' by the gap adjusting meanswhile judging neutralizing conditions as to whether a charged potential measured by an electrometeris within an allowable value by the control unitor not.

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Sendai, Japan

Yasuhiko Fukuchi