Optimet, Optical Metrology Ltd.

Yann Malet

Gabriel Y Sirat

Jacob Vecht

A method and apparatus for inspecting a three dimensional structure, such as an electronic component, using collimated light for accurately measuring the three-dimensional structure of members protruding above the surface of the component. Collimated light illuminates the surface, and spherical or other three-dimensional structure on the surface is analyzed, using stereoscopic, holographic, Moire, or conoscopic analysis of light reflected or scattered by the structure, using an array of optical detectors in a detector plane.

Optical ball grid array inspection system

A linear conoscope producing a conoscopic interferogram of an object wherein the phase shift giving rise to the interferogram is substantially linearly dependent on displacement of an object from a geometrical axis. Two anisotropic optical elements are provided and oriented with respect to one another in such a manner as to cancel the predominant term in which the phase shift depends quadratically on displacement from the geometrical axis.

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Saint-Cyr l'Ecole, France

Yann Malet