Hefei University of Technology

Xiaoying Hou

Haojie Xia

Jie Wang

Liandong Yu

Huining Zhao

A measurement system for detecting deep-hole surface topography based on low-coherence interferometry (LCI) can include a detection part and an autocollimation system. The detection part includes a white light interferometric system, which specifically includes a 1550 nm amplified spontaneous emission (ASE) broadband light source, a first reflector, a first beam splitting prism, a second reflector, and a reference reflector that are arranged in sequence, where a to-be-measured deep-hole and a near-infrared camera are respectively arranged at two sides of the first beam splitting prism, and a conical prism is disposed inside the to-be-measured deep-hole. The autocollimation system is disposed between the to-be-measured deep-hole and the first beam-splitting prism. The autocollimation system includes a 630 nm light source, a dichroic prism, a second beam-splitting prism, a third reflector, and a quadrant detector that are arranged in sequence.

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Anhui, China

Xiaoying Hou