Chinese Academy of Sciences

Xiaoning Zhan

Yu Chen Zhou

Hui Calvin Yang

Hongwei Gao

Meixin Feng

Qian Sun

Yaozong Zhong

Jianxun Liu

Shuai Su

The present application discloses a semiconductor device and a manufacturing method thereof. The manufacturing method comprises manufacturing a semiconductor material layer comprising two laminated semiconductor layers between which an etching transition layer is provided; and etching a part of one of semiconductor layers located in a selected region until etching is stopped after reaching or entering the etching transition layer, subjecting the part of the etching transition layer located in the selected region to thermal decomposition through thermal treatment to be completely removed, and realizing termination of thermal decomposition on another semiconductor layer, so as to precisely form a trench structure in the semiconductor material layer. The present application can achieve precise control of the depth of the trench etched on the semiconductor material to thoroughly avoid surface damage caused by etching and ensure that the electrical characteristic of the device is not affected by fluctuation of the etching process.

Semiconductor device and manufacturing method thereof employing an etching transition layer

Growing community of inventors

Suzhou, China

Xiaoning Zhan