Institut Fuer Mikroelektronik Stuttgart

Robert Boschgmbh

Institut Fur Mikroelektronik Stuttgart

Wolfgang Appel

Joachim N Burghartz

Martin Zimmermann

Helmut Schneider

Volker Dudek

Gerhard Conzelmann

Heinz Pfizenmaier

In a method for producing a very thin chip including an integrated circuit, a circuit structure is produced in a defined section of a semiconductor wafer. The defined wafer section is subsequently released from the semiconductor wafer. For this purpose, the wafer section is firstly freed such that it is held only via local web-like connections on the remaining semiconductor wafer, which web-like connections are arranged at a lateral periphery of the wafer section. The web-like connections are subsequently severed.

Method for producing a thin chip comprising an integrated circuit

In a method for producing a thin film chip including an integrated circuit, a semi-conductor wafer having a first surface is provided. At least one cavity is produced under a defined section of the first surface by means of porous silicon. A circuit structure is produced in the defined section. The defined wafer section is subsequently released from the semiconductor wafer by severing local web-like connections, which hold the wafer section above the cavity and on the remaining semiconductor wafer.

Method for producing a thin semiconductor chip comprising an integrated circuit

A transistor component is suited for controlling large currents, even given high frequencies. The transistor component includes integrated emitter resistors which are arranged between partial-emitter regions and emitter-metal contacts. The integrated emitter resistors cause a stabilized, uniform current distribution both over the various partial-emitter regions, and within the partial-emitter regions, and bring about an improved current carrying capacity, as well as improved high-frequency properties, particularly in view of the finite magnitude of the extrinsic base resistance.

Transistor component having an integrated emitter resistor

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Schwieberdingen, Germany

Wolfgang Appel