The University of Texas System

William J Durand

Christopher John Ellison

Christopher M Bates

Julia Cushen

Erica L Rausch

Logan J Santos

Leon Dean

Takehiro Seshimo

C Grant Willson

C Grant Wilson

Vacuum deposited thin films of material are used to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nano structured features in a block copolymer film that can serve as lithographic patterns.

Using chemical vapor deposited films to control domain orientation in block copolymer thin films

Vacuum deposited thin films of material are described to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nanostructured features in a block copolymer film that can serve as lithographic patterns.

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Austin, TX, United States of America

William J Durand