Taiwan Semiconductor Manufacturing Comp. Ltd.

Wi William Lee

Ying-Chen Chao

Sen-Shan Yang

Keng-Hui Liao

An accelerated thermal stress cycle test which can be conducted in a significantly reduced test time compared to the conventional test is provided. The test is carried out in a cluster of reaction chambers that includes a CVD chamber and a cool-down chamber such that a pre-processed wafer can be heated from room temperature to at least 350&deg; C. in an inert gas in about 2 min., and then cooled down to not higher than 70&deg; C. in a cool-down chamber in less than 30 sec. The heating and cooling steps can be repeated between 3 and 7 times to reveal any defect formation caused by the thermal stress cycle test. Typical defects are metal film peeling from insulating dielectric material layer or void formation.

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Tainan, Taiwan

Wi William Lee