Industrial Technology Research Institute

Wen-Liang Huang

Ting-Wei Huang

Chih-Chen Chang

Jau-Chyn Huang

Ching-Sung Hsiao

Jen-Hui Tsai

Ju-Chia Kuo

A plasma generating device, has a plurality of cavities shaped like half-ellipsoids, a plasma cavity, and microwave sources. The present invention takes advantage of geometrical properties of the propagation of electromagnetic waves by enclosing an electromagnetic field in the microwave range in overlapping cavities that together are shaped like a plurality of half ellipsoids. Each of the cavities has a first focus and a second focus, with the first foci of the cavities place close to each other. Microwaves entering the cavities at the second foci propagate inside the cavity and are focused at the first foci. The area around the first foci of both half ellipsoids forms a plasma cavity, providing a large volume filled with a microwave field. Thereby an increased volume of an electromagnetic field and thus of a plasma is achieved.

Multiple elliptical ball plasma apparatus

A directional coupler for microwave cavities is used to guide microwave signal power in both directions. The directional coupler contains a first carrier and a second carrier overlapped with each other, a metal line (such as a micro strip line) between the first and second carriers, a signal connector between both ends of the micro strip line, and a metal shell. The first and second carriers and the micro strip line are made using the print board technology. A copper foil is formed on the circuit board surface of the first carrier to form metal lines (such as micro strip lines). The circuit board surfaces of the first and second carriers are coated with a metal shell by electroplating means. A microwave cavity directional coupler with a simple structure and manufacturing process is thus achieved.

Directional coupler for microwave cavities

Growing community of inventors

Hualien County, Taiwan

Wen-Liang Huang