Mpi Corporation

Wen-Chi Chen

Che-Wei Lin

Chin-Yi Lin

Huo-Kang Hsu

Shu-Jui Chang

Chao-Ching Huang

Sheng-Wei Lin

Tzung-Je Tzeng

Chiu-Chu Chang

Zhi-Wei Su

Hsueh-Chih Wu

Jian-Kai Hong

A positionable probe card includes a space transformer, a plurality of positioning pins, and a probe head. The space transformer includes a space transforming substrate, the space transforming substrate includes a plurality of apertures, and the positioning pins are respectively fixed in the apertures. The probe head includes a plurality of positioning holes, and the positioning pins are respectively inserted into corresponding positioning holes. In addition, a method of manufacturing a positionable probe card is also disclosed herein.

Positionable probe card and manufacturing method thereof

A combined probe head being disposed in a space transformer of a vertical probe card is provided, in which the combined probe head is used for differentiating or segmenting a layout area of the probes in the vertical probe card. The combined probe head may include a locating plate and sub-probe heads. The locating plate may include fixed portions. Each sub-probe head may include corresponding sub-dies and probes inserted between the sub-dies, and each sub-probe head is assembled and fixed in the corresponding fixed portion. Therefore, the layout area of the probes in the vertical probe card can be respectively differentiated or segmented from the sub-probe heads in order to avoid mutual interference under repair process. In addition, a related method for assembling and aligning the above mentioned combined probe head is provided.

Combined probe head for a vertical probe card and method for assembling and aligning the combined probe head thereof

Growing community of inventors

Hsinchu County, Taiwan

Wen-Chi Chen