Average Co-Inventor Count = 5.60
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (3 from 3,768 patents)
3 patents:
1. 12272570 - Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
2. 12272571 - Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
3. 12057295 - RF power compensation to reduce deposition or etch rate changes in response to substrate bulk resistivity variations