Taiwan Semiconductor Manufacturing Comp. Ltd.

Wei-Chun Pai

Chun-Jen Chen

Sheng-Huan Chiu

Cheng Wei Ho

A method includes forming a first polymer layer over a plurality of metal pads, and patterning the first polymer layer to forming a plurality of openings in the first polymer layer. The plurality of metal pads are exposed through the plurality of openings. A plurality of conductive vias are formed in the plurality of openings. A plurality of conductive pads are formed over and contacting the plurality of conductive vias. A conductive pad in the plurality of conductive pads is laterally shifted from a conductive via directly underlying, and in physical contact with, the conductive pad. A second polymer layer is formed to cover and in physical contact with the plurality of conductive pads.

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Hsinchu, Taiwan

Wei-Chun Pai