Hitachi High-tech Corporation

Wei Chean Tan

Hiroyuki Chiba

Ryo Komatsuzaki

Hirofumi Sato

Keisuke Igarashi

Mai Yoshihara

Hirofumi Satou

A technique that enables automatic focus adjustment even for a sample having regions with different heights is proposed. A charged particle beam device according to the disclosure includes: a sample holder configured to hold a sample; a sample stage configured to move the sample; a charged particle gun and a charged particle beam column configured to irradiate the sample with a charged particle beam; an objective lens configured to perform focus adjustment by changing an intensity of a focusing effect on the charged particle beam; a detector configured to detect electrons from the sample and output a signal forming an electron image; an optical imaging device configured to capture an optical image of the sample; and a control device configured to calculate height information of the sample based on the optical image obtained by imaging the sample by the optical imaging device, and automatically set a focus adjustment value of an observation site based on the height information (see FIG.).

Charged particle beam apparatus and focus adjusting method therefor

A sample image display systemdisplays, on a screen, a plurality of imagesof a sample S and a symbolcorresponding to each of the images. The sample image display systemdisplays each symbolin a different mode according to information related to the corresponding image

Sample image display system and charged particle beam apparatus

A charged particle beam apparatus includes a charged particle beam optical system that irradiates a sample on a sample stage with a charged particle beam; a detector that detects a signal generated from the sample; a charged particle beam imaging device that acquires an observation image from the signal; an optical imaging device that captures an optical image of the sample; a stage that rotatably holds the sample stage; a stage control device that controls movement and rotation of the stage; and an image composition unit that combines a plurality of optical images. The stage is moved so that the center of an imaging range of the optical imaging device is located at a position different from the rotation center of the stage, and then rotated. A plurality of optical images relating to different positions of the sample by rotation operation are acquired and combined to generate the composite image.

Charged particle beam apparatus

A charged particle beam deviceincludes an irradiation unitconfigured to irradiate a sample S with a charged particle beam, a detection unitconfigured to output a signal caused by irradiating the sample S with the charged particle beam, a display unitconfigured to output a condition selection interface for selecting one condition set from a plurality of condition sets, and a control unitconfigured to execute an evaluation on an object of interest. The condition set includes information for specifying one learned model from a plurality of learned models, information for specifying one search condition from a plurality of search conditions including at least one of an irradiation condition and a detection condition, and information for specifying one analysis condition from a plurality of analysis conditions defining an operation of at least one of the irradiation unitand the detection unit. The charged particle beam deviceis configured to accept a selection of the condition set via the condition selection interface, irradiate a first region of the sample S with the charged particle beam based on the specified search condition and detect a first signal caused by the irradiation, transfer information that is based on the first signal to the specified learned model, acquire information that represents a second region of the sample S including a position of a candidate of the object of interest from the specified learned model, the second region being a part of the first region and smaller than the first region, irradiate the second region with the charged particle beam based on the specified analysis condition and detect a second signal caused by the irradiation, and input information that is based on the second signal to the control unit

Charged particle beam device

A charged particle beam deviceincludes: an irradiation unitconfigured to irradiate a sample S with a charged particle beam; a particle detection unitconfigured to detect a particle caused by the irradiation of the sample with the charged particle beam; and a control unitconfigured to generate an image of the sample based on an output from the particle detection unit, wherein the control unitinputs the image of the sample S into models Mand Mfor detecting a first structureand a second structure, acquires a first detection result related to the first structureand a second detection result related to the second structurefrom the models Mand M, determines locations or regions of the first structureand the second structurebased on the first detection result and the second detection result, and outputs an integration result imagerepresenting the location or the region of the first structureand the location or the region of the second structure

The charged particle beam apparatus includes a charged particle beam optical system that irradiates a sample mounted on a sample stage with a charged particle beam; a detector that detects a signal generated from the sample; a charged particle beam imaging device that acquires an observation image from the signal detected by the detector; an optical imaging device that captures an optical image of the sample; a stage that rotatably holds the sample stage; a stage control device that controls movement and rotation of the stage; and an image composition unit that combines the plurality of optical images to generate a composite image. The stage control device is configured to move the stage so that the center of an imaging range of the optical imaging device is located at a position different from the rotation center of the stage and then, to rotate the stage, the optical imaging device acquires a plurality of optical images relating to different positions of the sample by rotation operation, and the image composition unit combines the plurality of optical images obtained by the rotation operation to generate a composite image.

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Tokyo, Japan

Wei Chean Tan