International Business Machines Corporation

Ortho Diagnostic Systems Inc.

Other

Ecophysics Ag

Walter Imfeld

Leping Li

Cong Wei

James Albert Gilhooly

Werner Moser

Clifford Owen Morgan, Iii

Martin Kuster

Rosemary K Chachowski

Karl Puchegger

Hansjoerg Kunz

Mykola Yaremko

Marco Forster

Beat Gretener

Matthias Kutter

Martin Gander

Joseph Knee

Linus Flueler

Gregor Batliner

Bruno Greuter

Marcel Frischknecht

Heinz Stuenzi

Xinhui Wang

Steven G Barbee

Scott R Cline

Adrian Siegrist

Heinz Stunzi

An apparatus for measuring ammonia gas concentration in an ongoing chemical mechanical polishing (CMP) cycle utilizing an acidic CMP slurry, having the following components:

Apparatus for detecting CMP endpoint in acidic slurries

An apparatus is described for detecting the presence of a gaseous chemical produced during a chemical-mechanical polishing operation. The apparatus includes a catalytic converter, a reaction chamber and a light sensor. The catalytic converter, heated to about 800&deg; C. converts the chemical to a different chemical product. The reaction chamber produces an excited species; the pressure in the reaction chamber is maintained sufficiently low to substantially avoid collisional deactivation of the excited species, so as to permit real-time detection of the chemical. A light signal from the excited species is input to the light sensor. An output from the light sensor corresponds to the real-time detection of the chemical, thereby permitting real-time control of the chemical-mechanical polishing operation.

Chemiluminescence detection apparatus

Device for in-situ collection of a gaseous reaction product from a polishing slurry as a workpiece, such as a semiconductor wafer, is being polished with the slurry, including a probe capable of being placed in contact with the slurry, the probe having a channel for transmitting the gaseous reaction product to an analyzer, a first hydrophobic membrane for allowing passage of the gaseous reaction product from the slurry to the channel, and means for directing a carrier gas through the channel.

Probe for slurry gas sampling

A blood analysis system or instrument, generally, including an incubator station, a sample and reagent holding station, a pipette assembly, a centrifuge, an analysis station, and a transport assembly. Generally, the incubation station holds containers while reagents and fluids are being dispensed in those containers, and, if desired, for incubating the containers. The sample and reagent holding station holds samples and a plurality of reagents, and the pipette assembly transfers fluids from that sample and reagent holding station to containers in the incubation station. The centrifuge is provided for centrifuging the container, and the analysis station is provided to analyze the containers optically to identify reactions therein. The transport assembly carries the containers between the incubator station, the centrifuge, and the analysis station. Preferably, the pipette assembly is automatically operated to draw fluids and preselected reagents from the sample and reagent holding station, and to dispense fluids into the containers held in the incubation station to produce predetermined solutions therein. Also, the transport subassembly is automatically operated to carry containers from the incubator station to the centrifuge after the predetermined solutions have been produced in the containers, and then to carry the containers from the centrifuge to the analysis station.

Automated blood analysis system

Automated blood analysis system with an integral centrifuge

Growing community of inventors

Hombrechtikon, Switzerland

Walter Imfeld