Maxim Integrated Products, Inc.

Intel Corporation

Other

Viren V Khandekar

Karthik Thambidurai

Arkadii V Samoilov

Yong L Xu

Amit Subhash Kelkar

Yi-Sheng Anthony Sun

Hien D Nguyen

Tiao Zhou

Peter R Harper

Ahmad Ashrafzadeh

Chunho Kim

Pirooz Parvarandeh

Vivek Swaminathan Sridharan

Duane Wilcoxen

Viresh Patel

Xiansong Chen

Md Kaysar Rahim

S Kaysar Rahim

Jesus L Munoz

Lilia Benigra-Unite

Mario M Tobias

Ruel Jucoy Mijares

Edson Macgregor Arca Leano

Hilario Sanchez Jacala

Kaysar M Rahim

Joseph W Serpiello

A system for monitoring and controlling an IC testing machine includes a vibration sensor, a sensor interface, and a processor coupled to the sensor interface. The vibration sensor is in mechanical communication with an IC testing machine to develop an electrical vibration signal representing mechanical vibrations generated by the operation of the IC testing machine. The sensor interface processes the vibration signal to develop vibration data that can be processed by the processor to determine whether the vibration data is indicative of an operational anomaly and, if so, to generate a machine control signal to correct an operation of the IC testing machine. Multiple vibration sensors can be used to increase the amount of vibration data available for analysis.

System for monitoring and controlling an integrated circuit testing machine

Wafer-level (chip-scale) package semiconductor devices are described that have bump assemblies configured to maintain standoff (bump) height. In an implementation, the wafer-level chip-scale package devices include an integrated circuit chip having an array of bump assemblies disposed over the integrated circuit chip. The array of bump assemblies comprises a plurality of first bump assemblies that include solder bumps composed at least substantially of a solder composition (i.e., do not include a core). The array further includes at least one second bump assembly including a solder bump having a core configured to maintain standoff height of the wafer-level package device.

Wafer-level chip-scale package device having bump assemblies configured to maintain standoff height

Techniques for forming a wafer level package device are disclosed. In one or more embodiments, the techniques include forming a wafer level lead frame on a carrier wafer and electrically connecting the wafer level lead frame to an active semiconductor wafer. The carrier wafer and the active semiconductor wafer have at least substantially the same coefficients of thermal expansion. The carrier wafer can be removed from the wafer level package device, and a number of connectors can be formed on the wafer level package device. The wafer level package device can be singulated to form chip packages, such as DFN or QFN packages.

Wafer level package device formed using a wafer level lead frame on a carrier wafer having a similar coefficient of thermal expansion as an active wafer

An integrated circuit device is disclosed that includes a semiconductor substrate and a die attached to the semiconductor substrate. A conductive pillar is connected to at least one of the semiconductor substrate or the die. An overmold is molded onto the semiconductor substrate over the die, and the conductive pillar extends through the overmold.

Three-dimensional chip-to-wafer integration

Semiconductor devices are described that have bump assemblies configured to furnish shock absorber functionality. In an implementation, a wafer-levelchip-scale package devices include an integrated circuit chip having an array of bump assemblies disposed over the integrated circuit chip. The array of bump assemblies comprises a plurality of first bump assemblies that include solder bumps composed at least substantially of a solder composition (i.e., solder bumps that do not include a core). The array further comprises a plurality of second bump assemblies that includes a solder bump having a core configured to furnish shock absorber functionality to the integrated circuit chip.

Wafer-level chip-scale package device having bump assemblies configured to furnish shock absorber functionality

A wafer level package includes a wafer, a lead disposed of the wafer for connecting the wafer to an electrical circuit, and a core disposed of the lead. In some embodiments, the lead disposed of the wafer is a copper pillar, and the core is plated onto the copper pillar. In some embodiments, the core is polymer screen-plated onto the lead. In some embodiments, the core extends between at least approximately thirty-five micrometers (35 &#x3bc;m) and fifty micrometers (50 &#x3bc;m) from the lead. In some embodiments, the core covers between at least approximately one-third (&#x2153;) and one-half (&#xbd;) of the surface area of the lead. In some embodiments, the core comprises a stud-shape extending from the lead. In some embodiments, the core extends perpendicularly across the lead. In some embodiments, the core extends longitudinally along the lead. Further, a portion of the core can extend perpendicularly from a longitudinal core.

Solder fatigue arrest for wafer level package

Semiconductor package device, such as wafer-level package semiconductor devices, are described that have pillars for providing electrical interconnectivity. In an implementation, the wafer-level package devices include an integrated circuit chip having at least one pillar formed over the integrated circuit chip. The pillar is configured to provide electrical interconnectivity with the integrated circuit chip. The wafer-level package device also includes an encapsulation structure configured to support the pillar.

Technique for wafer-level processing of QFN packages

Techniques are described herein for a dip soldering process which provides a low-profile, low-cost solder bump formation process which may be implemented to promote package thickness scaling (e.g., reduce the overall package thickness). For example, the dip soldering process disclosed herein may enable ultra-thin wafer-level packages (WLP), ultra-thin wafer level quad-flat no-leads (WQFN) packages, or the like.

Low-cost low-profile solder bump process for enabling ultra-thin wafer-level packaging (WLP) packages

A device and fabrication techniques are described that employ wafer-level packaging techniques to fabricate semiconductor devices that include an embedded integrated circuit chip device and an embedded passive device on a semiconductor wafer device. In implementations, the wafer-level package device includes a semiconductor wafer device, an embedded integrated circuit chip, an embedded passive device, an encapsulation structure covering at least a portion of the semiconductor wafer device, the embedded integrated circuit chip, and the embedded passive device, at least one redistribution layer structure, and at least one solder bump for providing electrical interconnectivity to the devices. Once the wafer is singulated into semiconductor devices, the semiconductor devices may be mounted to a printed circuit board, and the solder bumps may provide electrical interconnectivity through the backside of the device that interface with pads of the printed circuit board.

Wafer-level passive device integration

Wafer-level package semiconductor devices for high-current applications are described that have pillars for providing electrical interconnectivity. In an implementation, the wafer-level package devices include an integrated circuit chip having at least one pillar formed over the integrated circuit chip. The pillar is configured to provide electrical interconnectivity with the integrated circuit chip. The wafer-level package device also includes an encapsulation structure configured to support the pillar. The wafer-level package device also includes an integrated circuit chip device (e.g., small die) configured upon the integrated circuit chip (e.g., large die). In the wafer-level package device, the height of the integrated circuit chip device is less than the height of the pillar and/or less than the combined height of the pillar and the one or more solder contacts.

Multi-die, high current wafer level package

A wafer-level package device and techniques for fabricating the device are described that include a second integrated circuit chip electrically coupled to a base integrated circuit chip, where the second integrated circuit chip is placed on and connected to the base integrated circuit chip between multiple high-standoff peripheral pillars with solder bumps. In implementations, the wafer-level package device that employs example techniques in accordance with the present disclosure includes a base integrated circuit chip, multiple high-standoff peripheral pillars with solder bumps, and a second integrated circuit chip electrically coupled to the base integrated circuit chip and placed on the base integrated circuit chip in the center of an array of high-standoff peripheral pillars with solder bumps.

Wafer-level package device having high-standoff peripheral solder bumps

Semiconductor devices are described that have an extended under ball metallization configured to mitigate dielectric layer cracking due to stress, particularly stress caused by CTE mismatch during thermal cycling tests, dynamic deformation during drop tests, or cyclic bending tests, and so on. In an implementation, the semiconductor package devices include an integrated circuit chip having a solder ball and under ball metallization, formed on the integrated circuit chip, which is configured to receive the solder ball so that the solder ball and the under ball metallization have a contact area there between, wherein the area of the under ball metallization is area greater than the contact area.

Integrated circuit device having extended under ball metallization

Wafer-level package (semiconductor) devices are described that have a pillar structure that extends at least partially into a solder bump to mitigate thermal stresses to the solder bump. In implementations, the wafer-level package device may comprise an integrated circuit chip having a surface and a solder bump disposed over the surface. The wafer-level package device may also include a pillar structure disposed over the surface that extends at least partially into the solder bump.

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Chandler, AZ, United States of America

Viren V Khandekar