Taiwan Semiconductor Manufacturing Comp. Ltd.

TSMC China Company Limited

Tzu-Heng Chang

Jen-Chou Tseng

Ming-Hsiang Song

Ming-Fu Tsai

Kuo-Ji Chen

Yu-Ti Su

Yu-Ying Hsu

Jam-Wem Lee

Pin-Hsin Chang

Hsin-yu Chen

Kai-Ping Huang

Chih-Liang Chen

Fong-yuan Chang

Hsin-Yu Chen

Li-Wei Chu

XinYong Wang

Tsung-Che Tsai

Taede Smedes

Johannes Van Zwol

HoChe Yu

Bo-Ting Chen

The present disclosure provides electrostatic discharge circuits and structures and methods for operating the electrostatic discharge circuits and structures. A circuit includes a first transistor and a second transistor. Each of the first transistor and second transistor includes a drain, a source, and a gate. The drain of the first transistor is connected to a first terminal; the source thereof is connected to receive a first voltage, and the gate thereof is connected to receive a second voltage different from the first voltage. The source and the gate of the second transistor are connected to receive the second voltage, and the drain thereof is connected to the first terminal. In response to the terminal reaching a trigger voltage, the first transistor is configured to be turned on, such that electrostatic charges at the first terminal are configured to be discharged through the first transistor.

Electrostatic discharge circuits and methods for operating the same

A method of making a semiconductor device includes manufacturing an ESD cell over a substrate, wherein the ESD cell includes multiple diodes connected in parallel to each other. The method includes manufacturing a conductive pillar electrically connected to the ESD cell of the semiconductor device; manufacturing a through-silicon via (TSV) extending through the substrate, wherein the TSV extends through the substrate within a TSV zone having a TSV zone perimeter, and wherein a first end of the TSV is at a same side of the substrate as the ESD cell, and a second end of the TSV is at a different side of the substrate from the ESD cell. The method includes manufacturing an antenna extending parallel to the TSV at a same side of the substrate as the ESD cell; and manufacturing an antenna pad electrically connected to the TSV, the antenna, and the conductive pillar.

Method of making electrostatic discharge protection cell and antenna integrated with through silicon via

The present disclosure provides electrostatic discharge circuits and structures and methods for operating the electrostatic discharge circuits and structures. A circuit includes a first transistor and a second transistor. The first transistor includes a drain, a source, a gate, and a bulk. The drain of the first transistor is connected to a first terminal. The source of the first transistor is connected to receive a first voltage. The gate and the bulk of the first transistor is connected to receive a second voltage. The second transistor includes a drain, a source, a gate, and a bulk. The source, the gate, and the bulk of the second transistor is connected to receive the second voltage. The drain of the second transistor is connected to the first terminal. In response to the terminal reaching a trigger voltage, the first transistor is configured to be turned on.

The present disclosure provides a power clamp device. The power clamp device includes a delay element, a first transistor, a second transistor, and a gate control circuit. The delay element has an input terminal and an output terminal. The first transistor has a gate electrically connected to the output terminal of the delay element. The second transistor has a source electrically connected to a drain of the first transistor. The gate control circuit has a first terminal electrically connected to the input terminal of the delay element, a second terminal electrically connected to the output terminal of the delay element, and a third terminal electrically connected to a gate of the second transistor.

Power clamp device

A semiconductor device includes a through-silicon via (TSV) in a TSV zone in a substrate and the TSV extends through the substrate; an ESD cell proximal to a first end of the TSV and in contact with the TSV zone, the ESD cell including a set of diodes electrically connected in parallel to each other; an antenna pad electrically connected to a second end of the TSV; and an antenna electrically connected to the antenna pad and extending in a first direction, the first direction is parallel to a major axis of the TSV. The semiconductor device includes a conductive pillar extending parallel to the TSV at a same side of the substrate as the antenna pad, wherein a first end of the conductive pillar electrically connects to the antenna pad, and a second end of the conductive pillar electrically connects to the set of diodes of the ESD cell.

Electrostatic discharge protection cell and antenna integrated with through silicon via

A device includes standard cells in a layout of an integrated circuit. The standard cells include a first standard cell and a second standard cell disposed next to each other. The first standard cell is configured to operate as an electrostatic discharge (ESD) protection circuit and includes a first gate and a second gate. The first gate includes a first gate finger and a second gate finger that are arranged over a first active region, for forming a first transistor and a second transistor, respectively. The second gate is separate from the first gate. The second gate includes a third gate finger and a fourth gate finger that are arranged over a second active region, for forming a third transistor and a fourth transistor, respectively. The first transistor and the second transistor are connected in parallel, and the third transistor and the fourth transistor are connected in parallel.

Device including integrated electrostatic discharge protection component

Systems and methods are provided for fail-safe protection of circuitry from electrostatic discharge due through input and output connections. The power circuitry may include a string of diodes, connections to power lines, and particular diodes for voltage pull-up and pull-down clamping. There may be both a pull-up third diode in the diode string for connection between I/O and VDD and a pull-down third diode between I/O and VSS. During an ESD event the ESD device is configured to hold voltage from exceeding a threshold voltage and damaging internal circuitry. During operational mode the ESD device is turned off and does not interfere with circuit operations.

Failsafe input/output electrostatic discharge protection with diodes

An electrostatic discharge (ESD) protection circuit is coupled between first and second power supply buses. The ESD protection circuit includes a detection circuit; a pull-up circuit, coupled to the detection circuit, comprising at least a first n-type transistor; a pull-down circuit, coupled to the pull-up circuit, comprising at least a second n-type transistor; and a bypass circuit, coupled to the pull-up and pull-down circuits, wherein the detection circuit is configured to detect whether an ESD event is present on either the first or the second bus so as to cause the pull-up and pull-down circuits to selectively enable the bypass circuit for providing a discharging path between the first and second power supply buses.

Electrostatic discharge protection circuit

A device includes first and second standard cells in a layout of an integrated circuit, and first and second active regions. The first standard cell includes an electrostatic discharge (ESD) protection unit, and the second standard cell includes first and second transistors that connect to the ESD protection unit. The first active region includes first, second, and third source/drain regions. The first standard cell includes a first gate arranged across the first active region; and a second gate that is separated from the first gate and is arranged across the first active region and the second active region. The first gate, the first source/drain region and the second source/drain region together correspond to a third transistor of the ESD protection unit. The second gate, the second source/drain region and the third source/drain region together correspond to the first transistor.

A device includes standard cells in a layout of an integrated circuit, the standard cells includes first and second standard cells sharing a first active region and a second active region. The first standard cell includes first and second gates. The first gate includes a first gate finger and a second gate finger that are arranged over the first active region, for forming the first transistor and the second transistor. The second gate is separate from the first gate, the second gate includes a third gate finger and a fourth gate finger that are arranged over the second active region, for forming the third transistor and the fourth transistor. The second standard cell includes a third gate arranged over the first active region and the second active region, for forming the fifth transistor and the sixth transistor. The first to fourth transistors operate as an electrostatic discharge protection circuit.

A method of making an electrostatic discharge (ESD) testing structure includes forming, in a first die, a first measurement device. The method further includes forming, in a second die, a fuse, a first trim pad, and a second trim pad. The method further includes forming, between the first die and the second die, a plurality of electrical bonds, wherein a first bond of the plurality of bonds is electrically connected to the first trim pad and a first side of the fuse, and a second bond of the plurality of bonds is electrically connected to the second trim pad and a second side of the fuse.

Method of forming electrostatic discharge (ESD) testing structure

An apparatus includes an interposer and a plurality of dies stacked on the interposer. The interposer includes a first conductive network of a first trigger bus. Each of the plurality of dies includes a second conductive network of a second trigger bus, and an ESD detection circuit and an ESD power clamp electrically connected between a first power line and a second power line, and electrically connected to the second conductive network of the second trigger bus. The second conductive network of the second trigger bus in each of the plurality of dies is electrically connected to the first conductive network of the first trigger bus. Upon receiving an input signal, the ESD detection circuit is configured to generate an output signal to the corresponding second conductive network of the second trigger bus to control the ESD power clamps in each of the plurality of dies.

Method and apparatus of ESD protection in stacked die semiconductor device

Some embodiments relate to a semiconductor device on a substrate. An interconnect structure is disposed over the semiconductor substrate. A first conductive pad is disposed over the interconnect structure. A second conductive pad is disposed over the interconnect structure and spaced apart from the first conductive pad. A third conductive pad is disposed over the interconnect structure and spaced apart from the first and second conductive pads. A first ESD protection element is electrically coupled between the first and second conductive pads. A first device under test (DUT) is electrically coupled between the first and third conductive pads.

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Taipei, Taiwan

Tzu-Heng Chang