Industrial Technology Research Institute

National Taiwan University

Tzong-Ming Wu

Kuan-Chou Chen

Ping-Yu Hu

Muh-Wang Liang

Wu-Lang Lin

Ji-Bin Horng

Gwo-Jou Huang

Kuei-Jung Chen

Tsung-Wen Tsai

Dar-Zen Chen

Tien-Lu Ho

Sung-Ho Liu

Jen-Rong Huang

Jyh-Jone Lee

Wei-Ming Pai

Jiann-Cherng Chen

Sheng-Fu Tsai

Tung-Fang Yang

Chien-Rong Huang

Chun-Kai Huang

Shang-Yi Lin

Po-Fu Yen

Hui-Chih Lin

Zhong-Yi Haung

Wai-Kwuen Choong

Wen-Yo Lee

Yu-Sheng Wang

Ching-Ko Lin

Tian-Li Yu

Wu-Chen Su

Shu-Yi Wang

Chih-Lun Hsieh

Cheng-Yao Lin

A parameter analysis method and a parameter analysis system for metal additive manufacturing are provided. The parameter analysis method includes: establishing a powder bed model; simulating a multi-track melting result of the powder bed model according to a plurality of laser parameters to generate a melting model; analyzing the melting model to calculate a plurality of position divergences of a plurality of melting powders of the melting model, and defining a plurality of melting surface powders according to the position divergences; analyzing the melting surface powders to calculate a surface average curvature of the melting model; and determining a laser hatch in the laser parameters allows metal additive manufacturing to meet a quality as needed according to whether the surface average curvature is between a first curvature threshold and a second curvature threshold, the first curvature threshold being smaller than the second curvature threshold.

Parameter analysis method and parameter analysis system for metal additive manufacturing

A three-dimensional (3D) image dynamic correction evaluation and auxiliary design method for orthotics includes the following steps. 3D scanning information of the human body is obtained. A plurality of 2D images of the human body is obtained for identification, and the pixel values of the 2D images are calculated so as to synthesize an original 3D spine curve. The 2D images of the human body and the 3D scan information are synthesized. An image deformation prediction and correction method of body shape is used to generate a deformed body shape of the human body. A spine material properties and mechanical model prediction method is used to predict parameters of the position, direction and magnitude of the force applied by an orthotics to the human body according to the deformed body shape.

Method and system for 3D image dynamic correction evaluation and orthotics auxiliary design

The disclosed embodiments provide an adjustable brace including a first wearable part, a second wearable part, an angle adjustment mechanism and a resistance mechanism. The first wearable part and the second wearable part are pivotably connected to each other via the angle adjustment mechanism and the resistance mechanism.

Adjustable brace

A limb prosthesis including a palm, a forearm, an upper arm, an elbow joint and a wrist joint is provided. The palm has a first pivot and a first lock set. The upper arm has a socket. The elbow joint connects the forearm to the upper arm. The wrist joint includes a first connecting rod connected to the forearm. The first pivot rotatably penetrates through the first connecting rod. The first lock set is locked to the first pivot. A first wedge surface of the first lock set contacts a second wedge surface of the first connecting rod. By adjusting a distance between the first lock set and the first pivot, a magnitude of a forward force between the first wedge surface and the second wedge surface is adjusted, such that the palm is fixed relative to the first connecting rod or rotatable around an axial direction perpendicular to an extending direction of the forearm.

Limb prosthesis

An upper limb training device includes a first rod, a second rod, a third rod, a first resilient element, and a second resilient element. The second rod is pivoted to the first rod by a first revolution element. The third rod is pivoted to the second rod by a second revolution element. Two ends of the first resilient element respectively connect with the first rod and the third rod for providing resistance when the first rod and the second rod rotate relative to the third rod. Two ends of the second resilient element respectively connect with the first rod and the third rod for providing resistance when the first rod rotates relative to the second rod. The first revolution element is disposed between two connecting points at which the first resilient element and the second resilient element connect with the first rod.

Upper limb training device

A mechanically actuated airtight device for wafer carrier comprises a cover, at least one sealing gasket, at least one linked plate, and a driving wheel. The cover has a first face and a second face, and being formed with at least one hole therethrough. The sealing gasket is positioned above the hole of said cover, and has a base in a form of wedged ramp, where the base is further formed with a through opening. The linked plate has a first face and a second face, where the second face is at one side provided with a protuberance, and the first face is provided with at least one wedged ramp, and where the wedged ramp has a slope equal to that of the wedged ramp of the base, such that at least one of the wedged ramp of the first face of the linked plate mates with the wedged ramp of the second face of the linked plate. The driving wheel has a first face and a second face, where the first face is provided with a first guiding groove to allow the protuberance of the linked plate move along the first guiding groove. The invention is used as a chassis for a wafer carrier. Thus, when the wafer carrier is closed, it ensures a better airtight effect, and when the wafer carrier is opened so as to break the airtight, a pressure equalizing effect between the inside and outside of the wafer carrier is achieved enhancing removal of the casing of the wafer carrier quickly. Further, the level of the airtight can be adjusted as required.

Mechanically actuated air tight device for wafer carrier

A clean container having an elastic positioning structure includes a support element and a back positioning element on a base. A cover is disposed for covering the base, and a positioning part is disposed between the cover and the base, which has two elastic arms extended laterally, and each elastic arm extends with a pushing surface respectively. When a plate of brittle material is placed on the base, and the cover is closed, the pushing surfaces are elastically pressed against and push the plate respectively, so that the plate moves backwards and presses against the back positioning element. Therefore, the plate is prevented from being damaged. Additionally, the base, the cover, and the positioning part are made of a conductive material, so that the electrostatic charges for the plate is conducted out of the clean container, and has a protective function of an electrostatic discharge.

Clean container having elastic positioning structure

A fastening structure of a clean container is combined on a cover of the clean container with a dismountable fastener member, such that the cover is closed or opened on a base of the clean container. The fastener member includes a body, a positioning portion, and an elastic fastening arm, that are one-piece formed. The positioning portion extends from one side of the body to form a flat spring. A flange is formed on the flat spring to fasten the fastener member on the cover. The elastic fastening arm has an elastic arm, and a lateral flange is formed on one end of the elastic arm, and extends into the base to be buckled. The fastener member further includes an elastic auxiliary arm formed between the elastic arm and the body, so as to increase an elastic strength of the elastic fastening arm.

Fastening structure of clean container

Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the driving module stopped at the base of the cleaning container and be forced to move upwards relative to a sliding way inside the locating member and to cause the driving link of the driving module to drive the four-bar linkage upwards and to further force the second link of the four-bar linkage to push workpieces in respective insertion slots in a cassette on the clean container. The six-bar linkage positioning mechanism has only one degree of freedom so that it moves workpieces horizontally in the cassette into position by means of contact at a point, preventing contamination due to friction and also improving moving stability.

Six-bar linkage positioning mechanism

Disclosed is a clean container module, which includes a container body with a front opening, a rack inserted through the front opening into the inside of the container body, a top access board provided above the top panel of the container body, a bottom access board provided below the bottom panel of the container body, and the rack affix to the top access board and the bottom access board. Therefore, the rack, the top access board, and the bottom access board can provide a reasonable effect force transferring path when carrying the load, preventing obstruction of precision due to deformation of the container body during transportation. Further, the rack, the top access board, and the bottom access board can provide a satisfactory electrostatic protection.

Clean container module

A workpiece holder is provided inside a clean container such that when covering a housing of the clean container on a base of the clean container, the vertical slide of the workpiece holder is stopped at the base, and a locating member is continuously lowered with the housing, thereby causing the vertical slide to slide upwardly along the locating member and to turn a link, and then causing a holder member to be driven by the link to force a thrust face against workpieces, and therefore the workpieces are pushed into position in a cassette on the base. Because the vertical slide does not displace relative to the base when covering the housing on the base, neither friction nor particles are produced, and workpieces are well protected against contamination.

Workpiece holder for clean container

The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system. Because the present invention adopts a modular design, the drive source of each unit is isolated and the circuit of each unit is hidden so that the whole structure is most compact and the assembling/disassembling and maintenance are easier.

Apparatus for loading/unloading wafers to and from semiconductor fabrication equipment

A wafer container having a latching mechanism utilized to lock the door of the wafer container in an airtight status. The latching mechanism comprises a cam rotated to move a link and a locking plate pivoted to one end of the link, and a guide block adapted to guide the locking plate sliding into an insertion hole in the container body of the wafer container by using a straight guide means and a curved guide means of the guide block and then to turn the locking plate about pivot rods at the link, causing the locking plate to withstand against part of the container body and to hold down the door toward the inside of the container body and to lock the door in an airtight status.

Latching mechanism for locking/unlocking the door of a wafer container

The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.

Front-opening unified pod auto-loading structure

An air vent plug for clean container is disclosed, which includes a mounting ring, a plug body, and a plug cap, the plug cap having an inner ring fitted into the plug body, retaining notches forced into engagement with respective hooks of the plug body, an outer ring fitted over the outer surface of the mounting ring, and top hooks extended from the outer ring and hooked on respective pegs at the outer surface of the mounting ring. An O-ring is mounted outside the plug body and stopped between a collar of the plug body and a bottom edge of the mounting ring for sealing. A filter is mounted inside the plug body to prevent contamination from air passing through the plug body and the air vent of the clean container.

Growing community of inventors

Taipei, Taiwan

Tzong-Ming Wu