Institute of Nuclear Energy Research, Atomic Energy Council, Executive Yuan, R.o.c

Tzong-Daw Wu

Cheng-Chang Hsieh

Ching-Pei Tseng

Jiun-Shen Chen

A method for measuring a thickness of a thin film includes: a step of basing on a training database to establish an artificial neural network, the training database including a plurality of modified spectra and a plurality of film thicknesses corresponding individually to the plurality of modified spectra; a step of measuring a sample having a coated film so as to obtain a spectrum; and, a step of running the artificial neural network already trained by the plurality of modified spectra so as to use the spectrum to estimate a thickness of the coated film on the sample. In addition, a system related to the method for measuring a thickness of a thin film is provided to include a measuring unit, a spectrometer and a processing unit.

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Taoyuan, Taiwan

Tzong-Daw Wu