Taiwan Semiconductor Manufacturing Comp. Ltd.

Tuoh Bin Ng

Tzu-Ching Lin

Chii-Horng Li

Lilly Su

Cheng-Wen Cheng

Feng-Ching Chu

Chien-Chih Lin

An embodiment is a device including a first fin extending from a substrate, a first gate stack over and along sidewalls of the first fin, a first gate spacer disposed along a sidewall of the first gate stack, and a first source/drain region in the first fin and adjacent the first gate spacer. The first source/drain region including a first insulator layer on the first fin, and a first epitaxial layer on the first insulator layer.

Method for forming FinFET with source/drain regions comprising an insulator layer

A method for forming source/drain regions in a semiconductor device and a semiconductor device including source/drain regions formed by the method are disclosed. In an embodiment, a method includes etching a semiconductor fin to form a first recess, the semiconductor fin defining sidewalls and a bottom surface of the first recess, the semiconductor fin extending in a first direction; forming a source/drain region in the first recess, the source/drain region including a single continuous material extending from a bottom surface of the first recess to above a top surface of the semiconductor fin, a precursor gas for forming the source/drain region including phosphine (PH) and at least one of arsine (AsH) or monomethylsilane (CHSi); and forming a gate over the semiconductor fin adjacent the source/drain region, the gate extending in a second direction perpendicular the first direction.

Silicon phosphide semiconductor device

FinFet with source/drain regions comprising an insulator layer

Method of manufacturing a semiconductor device

Method of forming a FinFET device with gaps in the source/drain region

In an embodiment, a method includes: forming a first gate stack and a second gate stack on a fin; etching the fin to form a recess in the fin between the first gate stack and the second gate stack; forming an epitaxial source/drain region in the recess, the forming including: forming a first layer lining sides and a bottom of the recess by dispensing silane, dichlorosilane, trichlorosilane, and hydrochloric acid in the recess; and after forming the first layer, forming a second layer on the first layer by dispensing the silane, dichlorosilane, trichlorosilane, and hydrochloric acid in the recess, where each of the silane, dichlorosilane, trichlorosilane, and hydrochloric acid are dispensed at a first flow rate when forming the first layer and at a second flow rate when forming the second layer.

Semiconductor device and method

A method of forming a semiconductor device includes forming fin regions on a substrate, forming a patterned polysilicon structure over the fin regions, and etching back portions of the fin regions to form recessed fin regions. The method further includes forming a merged epitaxial region on the recessed fin regions and forming a capping layer on the merged epitaxial region using an etching gas and a deposition gas. The forming of the capping layer may include epitaxially growing a material of the capping layer faster along a first crystal direction of the capping layer than a second crystal direction of the capping layer by adjusting a ratio of a concentration of a first element in the etching gas to a concentration of a second element in the deposition gas, the first and second elements being different from each other, the first and second crystal directions being different from each other.

Growing community of inventors

Hsinchu, Taiwan

Tuoh Bin Ng