Keyence Corporation

Tsuyoshi Suenaga

Masaki Fujiwara

Shinya Takahashi

A shape measuring device includes an optical-axis-direction driving section configured to minutely relatively displace a stage in an optical axis direction of a light receiving section with respect to a light projecting section and the light receiving section such that a phase of a projection pattern on the stage is shifted at a minute pitch finer than width of the phase of the projection pattern projected on the stage, the minute pitch being defined by controlling light projecting elements of a pattern generating section.

Shape measuring device and shape measuring method

Provided is an image inspection device, an image inspection method and an image inspection program which are capable of easily and accurately inspecting a shape of an inspection target. In a setting mode, positioning image data of a setting target placed on a stage is registered. In an inspection mode, a positioning image is displayed on a display part based on the positioning image data. An image for positioning of the inspection target placed on the stage is displayed in the display part. Thereafter, image data for alignment of the inspection target is acquired, and then aligned to image data for alignment of the setting target. A size in a height direction of a measurement target place of the inspection target is measured based on the aligned height image data, to determine Pass/Fail of the inspection target. The determined determination result is displayed on the display unit.

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Osaka, Japan

Tsuyoshi Suenaga