International Business Machines Corporation

Globalfoundries Inc.

Troy Lawrence Graves-Abe

Mukta G Farooq

John Anthony Fitzsimmons

Chandrasekharan Kothandaraman

Toshiaki Kirihata

Arvind Kumar

Subramanian Srikanteswara Iyer

Daniel George Berger

Winfried W Wilcke

Christopher N Collins

Kevin Shawn Petrarca

Brian Joseph Greene

Richard Paul Volant

Spyridon Skordas

Robert Hannon

William Francis Landers

Kevin R Winstel

Joyce C Liu

Gerd Pfeiffer

Thuy L Tran-Quinn

Keith Kwong Hon Wong

Michael Patrick Chudzik

Sanjay C Mehta

Herbert Lei Ho

Renee Tong Mo

Conal Eugene Murray

Donald Francis Canaperi

Emily R Kinser

Wei Lin

Raghuveer Reddy Patlolla

Norman Whitelaw Robson

Rashmi Jha

Matthew T Shoudy

Benjamin Andrew Himmel

Binglin Miao

A processor-memory system, a stacked-wafer processor-memory system, and a method of fabricating a processor-memory system are disclosed. In an embodiment, the invention provides a processor-memory system comprising a memory area, a multitude of specialized processors, and a management processor. The specialized processors are embedded in the memory area, and each of the specialized processors is configured for performing a specified set of operations using an associated memory domain in the memory area. The management processor is provided to control operations of an associated set of the specialized processors. In one embodiment, each of the specialized processors controls a respective one associated memory domain in the memory area. In an embodiment, the processor-memory system further comprises a specialized processor wafer. The specialized processor wafer includes the memory area, and the multitude of specialized processors are embedded in the specialized processor wafer.

Architecture and implementation of cortical system, and fabricating an architecture using 3D wafer scale integration

Various embodiments include approaches for designing through-silicon vias (TSVs) in integrated circuits (ICs). In some cases, a method includes: identifying types of through-silicon vias (TSVs) for placement within an integrated circuit (IC) design based upon an electrical requirement for the TSVs, wherein the IC design includes distinct types of TSVs; calculating etch and fill rates for the IC design with the distinct types of TSVs with common etching and filling processes; and providing fabrication instructions to form the distinct types of TSVs according to the calculated etch and fill rates in the common processes.

Forming multi-sized through-silicon-via (TSV) structures

A method of making a semiconductor device includes disposing a mask on a substrate; etching the mask to form an opening in the mask; etching a trench in the substrate beneath the opening in the mask; and implanting a dopant in an area of the substrate beneath the opening of the mask, the dopant capable of gettering mobile ions that can contaminate the substrate; wherein the dopant extends through the substrate from a sidewall of the trench and an endwall of the trench.

Implant after through-silicon via (TSV) etch to getter mobile ions

A bonding material stack for wafer-to-wafer bonding is provided. The bonding material stack may include a plurality of layers each including boron and nitrogen. In one embodiment, the plurality of layers may include: a first boron oxynitride layer for adhering to a wafer; a boron nitride layer over the first boron oxynitride layer; a second boron oxynitride layer over the boron nitride layer; and a silicon-containing boron oxynitride layer over the second boron oxynitride layer.

Wafer bonding using boron and nitrogen based bonding stack

A structure to detect changes in the integrity of vertical electrical connection structures including a semiconductor layer and an electrically conductive material extending through an entire depth of the semiconductor layer. The electrically conductive material has a geometry that encloses a pedestal portion of the semiconductor layer within an interior perimeter of the electrically conductive material. At least one semiconductor device is present on the pedestal portion of the semiconductor layer within the perimeter of the electrically conductive material.

Structure and method to determine through silicon via build integrity

A TSV can be formed having a top section via formed through the top substrate surface and a bottom section via formed through the bottom substrate surface. The top section cross section can have a minimum cross section corresponding to design rules, and the top section depth can correspond to a workable aspect ratio. The top section via can be filled or plugged so that top side processing can be continued. The bottom section via can have a larger cross section for ease of forming a conductive path therethrough. The bottom section via extends from the back side to the bottom of the top section via and is formed after the substrate has been thinned. The TSV is can be completed by forming a conductive path after removing sacrificial fill materials from the joined top and bottom section vias.

3-D integration using multi stage vias

According to one embodiment of the present invention, a method of plating a TSV hole in a substrate is provided. The TSV hole may include an open end terminating at a conductive pad, a stack of wiring levels, and a plurality of chip interconnects. The method of plating a TSV may include attaching a handler to the plurality of chip interconnects, the handler having a conductive layer in electrical contact with the plurality of chip interconnects; exposing a closed end of the TSV hole, including the conductive pad, to an electrolyte solution; and applying an electrical potential along an electrical path from the conductive layer to the conductive pad causing conductive material from the electrolyte solution to deposit on the conductive pad and within the TSV hole, the electrical path including the conductive layer, the plurality of chip interconnects, the stack of wiring levels and the conductive pad.

Bottom-up plating of through-substrate vias

The formation of TSVs (through substrate vias) for 3D applications has proven to be defect dependent upon the type of starting semiconductor substrate employed. In addition to the initial formation of TSVs via Bosch processing, backside 3D wafer processing has also shown a defect dependency on substrate type. High yield of TSV formation can be achieved by utilizing a substrate that embodies bulk micro defects (BMD) at a density between 1e4/cc (particles per cubic centimeter) and 1e7/cc and having equivalent diameter less than 55 nm (nanometers).

Electrical leakage reduction in stacked integrated circuits having through-silicon-via (TSV) structures

Circuits incorporating three-dimensional integration and methods of their fabrication are disclosed. One circuit includes a bottom layer and a plurality of upper layers. The bottom layer includes a bottom landing pad connected to functional components in the bottom layer. In addition, the upper layers are stacked above the bottom layer. Each of the upper layers includes a respective upper landing pad that is connected to respective functional components in the respective upper layer. The landing pads are coupled by a single conductive via and are aligned in a stack of the bottom layer and the upper layers such that each of the landing pads is offset from any of the landing pads in an adjacent layer in the stack by at least one pre-determined amount.

Via structure for three-dimensional circuit integration

A structure including a first intermetallic compound and an alloy layer parallel to a sidewall of an opening and separating a diffusion barrier from a conductive material, the diffusion barrier is in direct contact with the alloy layer, the alloy layer is in direct contact with the first intermetallic compound, the first intermetallic compound is in direct contact with the conductive material, the first intermetallic compound is a precipitate within a solid solution of an alloying material of the alloy layer and the conductive material, and is molecularly bound to both the alloy layer and the conductive material, the alloy layer excludes the conductive material, and a first high friction interface located between the diffusion barrier and the alloy layer extending in a direction parallel to the sidewall of the opening, the first high friction interface results in a mechanical bond between the diffusion barrier and the alloy layer.

Sidewalls of electroplated copper interconnects

A structure including a seed layer located directly on top of and conformal to the diffusion barrier, wherein the seed layer is parallel to the sidewall and bottom of the opening, the seed layer comprises a crystalline structure suitable for plating copper; a first intermetallic compound and an alloy layer parallel to the sidewall of the opening and separating the seed layer from the conductive material, the first intermetallic compound is a precipitate within a solid solution of an alloying material of the alloy layer and the conductive material, and is molecularly bound to both the alloy layer and the conductive material, and a first high friction interface located between the seed layer and the alloy layer extending in a direction parallel to the sidewall of the opening, wherein the first high friction interface results in a mechanical bond between the seed layer and the alloy layer.

A method including depositing an alloying layer along a sidewall of an opening and in direct contact with a seed layer, the alloying layer includes a crystalline structure that cannot serve as a seed for plating a conductive material, exposing the opening to an electroplating solution including the conductive material, the conductive material is not present in the alloying layer, applying an electrical potential to a cathode causing the conductive material to deposit from the electroplating solution onto the cathode exposed at the bottom of the opening and causing the opening to fill with the conductive material, the cathode includes an exposed portion of the seed layer and excludes the alloying layer, and forming a first intermetallic compound along an intersection between the alloying layer and the conductive material, the first intermetallic compound is formed as a precipitate within a solid solution of the alloying layer and the conductive material.

A TSV structure, method of making the TSV structure and methods of testing the TSV structure. The structure including: a trench extending from a top surface of a semiconductor substrate to a bottom surface of the semiconductor substrate, the trench surrounding a core region of the semiconductor substrate; a dielectric liner on all sidewalls of the trench; and an electrical conductor filling all remaining space in the trench, the dielectric liner electrically isolating the electrical conductor from the semiconductor substrate and from the core region.

Growing community of inventors

Wappingers Falls, NY, United States of America

Troy Lawrence Graves-Abe