Toyoda Gosei Co., Ltd.

Kabushiki Kaisha Toyota Chuo Kenkyusho

Kabushiki Kaisha Toshiba

Toshiya Uemura

Naoki Shibata

Shigemi Horiuchi

Jun Ito

Masanori Murakami

Atsuo Hirano

Makoto Asai

Yasuo Koide

Naoki Arazoe

Shizuyo Noiri

Masanobu Ando

Koichi Ota

Shigeyuki Takahashi

Naohisa Nagasaka

Yasuhiko Ogisu

Toshiyasu Ito

Mamoru Kato

Takahiro Kozawa

Takahide Oshio

Masaki Hashimura

Junichi Umezaki

Katsuhisa Sawazaki

Toshikazu Funahashi

Ryohei Inazawa

Tomohiko Mori

Takeshi Ohwaki

Masahito Nakai

Masayuki Nakagawa

Koichi Nitta

Tadanobu Iwasa

Yuji Takahashi

Masanobu Senda

Hiroaki Oshio

Takemasa Yasukawa

Tetsu Kachi

Kazuyoshi Tomita

Nozomu Takahashi

Naoki Nakajo

Takaaki Mori

Kenji Shimomura

Jun Minoura

Tetsuya Taki

Yuhei Ikemoto

Hideki Mori

Akira Kojima

Takayoshi Yajima

Naoki Kaneyama

Hideki Omoya

Katsuaki Okabayashi

Masayuki Goto

Tomokazu Kitajima

Yoshinori Kinoshita

Masaaki Nakayama

Tomoharu Shiraki

Masahiro Ohashi

Kenjiro Arai

Koji Kaga

Hiroshi Tadano

Hideki Hosokawa

Ysauhiko Ogisu

Ippei Nagaike

Minoru Nohata

Shigeru Noguchi

A group-III nitride semiconductor light emitting element includes a semiconductor layer that includes a light emitting layer, a p-type semiconductor layer and an n-type semiconductor layer, a p-contact electrode that is in contact with the p-type semiconductor layer, an n-contact electrode that is in contact with the n-type semiconductor layer, and a support substrate that supports the semiconductor layer. The p-contact electrode and the n-contact electrode are disposed at a position between the semiconductor layer and the support substrate. In a case where the p-contact electrode and the n-contact electrode are orthogonally projected on a plate surface of the support substrate, the p-contact electrode and the n-contact electrode are formed in a shape in which the orthogonally projected p-contact electrode and the orthogonally projected n-contact electrode are not overlapped with each other.

Group-III nitride semiconductor light-emitting element and manufacturing method therefor

A group III nitride semiconductor light-emitting device includes: a conductive support; a p-electrode positioned on the support, a p-type layer containing a group III nitride semiconductor, an active layer and an n-type layer having a first surface, which are positioned in turn on the p-electrode; and an n-electrode positioned on the first surface of the n-type layer. A groove is formed in the first surface of the n-type layer in a pattern such that the first surface of the n-type layer is continuous. A light-transmitting insulating film is formed on side surface and bottom surface of the groove. The groove has a depth at least reaching the p-type layer. The n-electrode is formed in wiring form.

Group III nitride semiconductor light-emitting device and method for producing the same

A Group III nitride semiconductor light-emitting device includes a support, a p-electrode provided on the support, a p-type layer including a Group III nitride semiconductor and provided on the p-electrode, an active layer including a Group III nitride semiconductor and provided on the p-type layer, an n-type layer including a Group III nitride semiconductor and provided on the active layer, an n-electrode which is connected to the n-type layer, a first trench having a depth extending from a back surface of the p-type layer on a side of the p-electrode to reach the n-type layer, an auxiliary electrode which is in contact with a back surface of the n-type layer at a bottom of the first trench, but is not in contact with side walls of the first trench, and an insulating film which exhibits light permeability.

Group III nitride semiconductor light-emitting device including an auxiliary electrode in contact with a back surface of an n-type layer

The present invention provides a method for producing a Group III nitride semiconductor light-emitting device, the device including a light-emitting layer which is formed so as to contour a stripe-pattern embossment and to have a uniform thickness. In the production method, firstly, a stripe-pattern embossment having a serrated cross section is formed on one surface of a substrate. Subsequently, on the surface of the substrate on the side of the stripe-pattern embossment having a serrated cross section, an n-type layer, a light-emitting layer, and a p-type layer are sequentially deposited through reduced-pressure MOCVD so as to contour the embossment. Thus, each of the layers is formed so as to contour the embossment, and to have a stripe pattern with a serrated cross section. In this MOCVD process, the direction of gas flow is parallel with the direction of the stripe of the embossment. Thus, the light-emitting layer has uniform thickness and composition in an in-plane direction.

Method for producing group III nitride semiconductor light-emitting device

A method for producing a Group III nitride compound semiconductor element includes growing an epitaxial layer containing a Group III nitride compound semiconductor using a different kind of substrate as an epitaxial growth substrate, adhering a supporting substrate to the top surface of the epitaxial growth layer through a conductive layer, and then removing the epitaxial growth substrate by laser lift-off. Before adhesion of the epitaxial layer and the supporting substrate, a first groove that at least reaches an interface between the bottom surface of the epitaxial layer and the epitaxial growth substrate from the top surface of the epitaxial layer formed on the epitaxial growth substrate and acts as an air vent communicating with the outside of a wafer when the epitaxial layer and the supporting substrate are joined to each other. Next, the epitaxial layer is divided into each chip by separating the epitaxial growth substrate by laser lift-off, and then removing the epitaxial layer serving as the outer periphery of each chip. Next, the outer peripheral side surface of the epitaxial layer of each chip is at least completely covered with an insulating protective film. Next, the supporting substrate is separated into each chip.

Method for producing group III nitride compound semiconductor element

In the Group III nitride-based compound semiconductor light-emitting device of the invention, an non-light-emitting area is formed in a light-emitting layer. In a light-emitting diode where light is extracted on the side of an n-layer, an outer wiring trace portion and an inner wiring trace portion of an n-contact electrode impedes light emission from the light-emitting layer. Therefore, there are provided, at the interface between a p-layer and a p-contact electrode, high-resistance faces having a width wider than the orthogonal projections of contact areas between the outer and inner wiring trace portions and the n-layer on the interface between the p-contact electrode and the p-layer. Through this configuration, current flow is limited, and portions having a total area equivalent to that of the high-resistance faces of the light-emitting layer serve as non-light-emitting areas. Thus, current can be supplied preferentially to an area of the light-emitting area where the outer wiring trace portion and the inner wiring trace portion are difficult to shade light, whereby light extraction efficiency with respect to supplied current can be enhanced.

Group III nitride-based compound semiconductor light-emitting device

A light emitting device includes a light emitting element, including a substrate including group III nitride compound semiconductor, a luminous layer structure including group III nitride compound semiconductor, the luminous layer structure formed on a first surface of the substrate, and an irregular surface formed on a second surface of the substrate, the second surface including a principal light emission surface, and a translucent sealing member for sealing the light emitting element, the translucent sealing member being separated from the second surface. At least one of translucent gel material and an inert gas is filled between the light emitting element and the translucent sealing member.

Light emitting element having an irregular surface, light emitting device using the light emitting element, and method for manufacturing light emitting element

Light emitting diode chip

The method of the invention for producing a group III-V semiconductor device includes forming, on a base, a plurality of semiconductor devices isolated from one another, each semiconductor device having at least an n-layer proximal to the base, and a p-layer distal to the base, and having a p-electrode formed on the top surface of the p-layer, and a first low-melting-point metal diffusion preventing layer, the low-melting-point metal diffusion preventing layer being formed on the top surface of the p-electrode; forming, from a dielectric material, a side-surface protective film so as to cover a side surface of each semiconductor device; bonding the semiconductor device to a conductive support substrate via a low-melting-point metal layer; and removing the base through the laser lift-off process.

Group III-V semiconductor device and method for producing the same

A method of making a light emitting element, the light emitting element with a semiconductor layer represented by: AlInGaN (0&#x2266;X&#x2266;1, 0&#x2266;Y&#x2266;1, 0&#x2266;X+Y&#x2266;1), has the step of wet-etching a surface of the semiconductor layer by using an etching solution to have a roughened surface on the semiconductor layer. The wet-etching is conducted without irradiating the surface of the semiconductor layer with a light with a wavelength region corresponding to energy higher than bandgap energy of the semiconductor layer.

Method of making a light emitting element

To provide a light emitting element that can extract substantially all the light emitted from a luminous layer structure to the outside, a GaN substrate and a luminous layer structure are formed by growing III nitride compound semiconductor on a sapphire substrate that is a growth substrate. Thereafter, the sapphire substrate is lifted off and minute irregularities are formed on the exposed GaN substrate. The pitch of irregularities is shorter than the wavelength of light emitted from the luminous layer structure.

Group III nitride compound semiconductor light emitting element, light emitting device using the light emitting element: and method for manufacturing the light emitting element

An object of the invention is to prevent migration of silver contained in an electrode of a Group III nitride-based compound semiconductor light-emitting device. A positive electrode is formed on a p-type layer. In the positive electrode, an ITO light-transmitting electrode layer, a silver alloy reflecting electrode layer, a diffusion-preventing layer in which a Ti layer and a Pt layer are stacked, and a gold thick-film electrode are sequentially stacked on the p-type layer. The reflecting electrode layer made of a silver alloy contains palladium (Pd) and copper (Cu) as additives and also contains oxygen (O). By virtue of this structure, migration of silver from the silver alloy reflecting electrode layer and blackening of the interface between the silver alloy layer and the ITO light-transmitting electrode layer disposed thereunder are prevented, whereby light extraction efficiency can be enhanced.

Electrode and Group III nitride-based compound semiconductor light-emitting device having the electrode

In a group III nitride compound semiconductor light emitting device comprising an n-type semiconductor layer, a p-type semiconductor layer having a superlattice structure in which a first layer comprising at least Al and a second layer having a different composition from that of the first layer are laminated repetitively, and an active layer interposed between the n-type semiconductor layer and the p-type semiconductor layer, wherein an Al composition of the first layer which is the closest to the active layer is set to be lower than that of each of the other first layers, and wherein a doping amount of a p-type impurity in the first layer which is the closest to the active layer is set to be smaller than that of the p-type impurity of each of the other first layers or non-doped.

Group III nitride compound semiconductor light emitting device

The present invention contemplates preventing clogging of a dicer for forming separation trenches in a semiconductor wafer, and as well improving the yield of a semiconductor device cut out of the semiconductor wafer. A second adhesive to be charged into spaces contains an epoxy material as a base material. Silica filler particles (diameter: about 2 to about 4 &#x3bc;m) are added to the base material in an appropriate amount. Charging of the second adhesive may be performed by adding the adhesive dropwise to a side wall of a semiconductor wafer, or by immersing an edge of the semiconductor wafer in the adhesive in the form of liquid. When a liquid-form epoxy material of low viscosity is employed, the spaces can be evenly filled with the second adhesive by capillary action. An n-electrode is formed on an exposed surface of an n-type layer through vapor deposition employing a resist mask. Separation trenches are formed through half-cut dicing from the exposed surface of the n-type layer toward the second adhesive.

Method for producing semiconductor device

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Aichi-ken, Japan

Toshiya Uemura