Hitachi-high-technologies Corporation

Hitachi High-tech Corporation

Toshimasa Kameda

Kei Sakai

Satoru Yamaguchi

Hiroya Ohta

Kenji Tanimoto

Yoshinori Momonoi

Yoshihiro Kimura

Yasunori Takasugi

Junichi Kakuta

Hideki Itai

Proposed is a technique that can detect a random noise component at high accuracy without measurement pattern limitation and enables edge roughness measurement at higher accuracy. According to this disclosure, pattern matching and edge position correction are performed with respect to each of the left edge and the right edge of a line pattern in an obtained line pattern image, and an image with no roughness is generated. A PSD value is measured from the image, and the average PSD value of all the frequencies is determined as a random noise component, so that the random noise component can be detected at high accuracy. Further, the PSD value (random noise component) is subtracted from the PSD value of an original image, thereby measuring edge roughness at high accuracy.

Pattern measurement system, pattern measurement method, and program for measuring edge roughness at the edge of a pattern based on a random noise component

Provided is a charged particle beam apparatus, aiming at obtaining an image and the like focused on the sample surface and the bottom while preventing the visual field deviation occurred when focusing on the sample surface and the bottom respectively. The charged particle beam apparatus forms a first image (), which is based on detection of the first energy charged particles, based on an irradiation with a beam whose focus is adjusted on a sample surface side, forms a second image () which is based on detection of second energy charged particles having a relatively higher energy than the first energy and a third image () which is based on the detection of the first energy charged particles, based on the irradiation with a beam whose focus is adjusted on a bottom side of a pattern included in the sample, acquires a deviation between the first image and the third image, and composes the first image and the second image so as to correct the deviation.

Charged particle beam apparatus

The purpose of the present invention is to provide a charged particle beam device for detecting, with highly precise angular discrimination, charged particles emitted from a specimen. To achieve this purpose, proposed is a charged particle beam device provided with a scanning deflector for scanning on a specimen a charged particle beam emitted from a charged particle source, the charged particle beam device being provided with: a first detector for detecting charged particles obtained by scanning of the charged particle beam on a specimen, and a second detector placed between the first detector and the specimen, and supported so as to be able to move in the charged particle beam light axis direction.

Charged particle beam device

Growing community of inventors

Tokyo, Japan

Toshimasa Kameda