Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,341 patents)
1 patent:
1. 10316835 - Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatus