Kabushiki Kaisha Toshiba

Toshiba Electronic Devices & Storage Corporation

Toshifumi Nishiguchi

Hiroaki Katou

Saya Shimomura

Kenya Kobayashi

Tetsuo Matsuda

Tetsuya Ohno

Kouta Tomita

Hiroyuki Kishimoto

Yosuke Himori

Akio Suzuki

Yusuke Kobayashi

Tatsuya Nishiwaki

Yasuhiro Kawai

Takahiro Kawano

Shotaro Baba

Kohei Oasa

Kentaro Ichinoseki

Atsuro Inada

A semiconductor device includes a semiconductor part; first and second electrodes respectively on back and front surfaces of the semiconductor part; and a control electrode between the semiconductor part and the second electrode. The control electrode is provided inside a trench of the semiconductor part. The control electrode is electrically insulated from the semiconductor part by a first insulating film and electrically insulated from the second electrode by a second insulating film. The control electrode includes an insulator at a position apart from the first insulating film and the second insulating film. The semiconductor part includes a first layer of a first conductivity type provided between the first and second electrodes, the second layer of a second conductivity type provided between the first layer and the second electrode and the third layer of the first conductivity type selectively provided between the second layer and the second electrode.

Trench-gate MOS transistor and method for manufacturing the same

A semiconductor device includes a first electrode; a first semiconductor region provided on the first electrode; a second semiconductor region provided on the first semiconductor region; a third semiconductor region provided on the second semiconductor region; a second electrode provided on the third semiconductor region and electrically connected to the third semiconductor region; a third electrode aligned with the first semiconductor region and the second semiconductor region; a gate electrode provided between the third electrode and the second semiconductor region; a first insulating portion including a first insulating region provided between the third electrode and the first semiconductor region and facing the third electrode, a second insulating region facing the first semiconductor region, and at least one air-gap region located between the first insulating region and the second insulating region; and a second insulating portion provided between the gate electrode and the second semiconductor region.

Semiconductor device

A semiconductor device of embodiments includes a first electrode, a second electrode, a first semiconductor region, a second semiconductor region, a third semiconductor region, a conductive portion, a first insulating portion, a gate electrode, a second insulating portion, and a third insulating portion. The first to third semiconductor regions are provided between the first electrode and the second electrode. The conductive portion includes a first conductive portion and a second conductive portion on the second electrode side and having a lower impurity concentration than the first conductive portion. The first insulating portion is provided between the first conductive portion and the first semiconductor region. The gate electrode is provided between the second semiconductor region and the second conductive portion. The second insulating portion is provided between the second conductive portion and the gate electrode. The third insulating portion is provided between the second semiconductor region and the gate electrode.

Semiconductor device and method of manufacturing semiconductor device

A semiconductor device includes a semiconductor part; first and second electrodes respectively on back and front surfaces of the semiconductor part; third and fourth electrodes inside a trench of the semiconductor part, the fourth electrode being provided between the first electrode and the third electrode; a first insulating portion electrically insulating the third electrode from the semiconductor part; a second insulating portion electrically insulating the third electrode from the second electrode; a third insulating portion electrically insulating the fourth electrode from the semiconductor part; a fourth insulating portion electrically insulating the fourth electrode from the third electrode; and a fifth insulating portion including a first portion and a second portion, the first portion being provided inside the fourth electrode, the second portion extending outward of the fourth electrode. The second portion extends from the first portion in a first direction from the first electrode toward the second electrode.

According to one embodiment, a semiconductor device includes a first electrode, first, second, and third semiconductor regions, an insulating portion, a conductive portion, a gate electrode, and a second electrode. The first semiconductor region is provided on the first electrode and electrically connected to the first electrode. The second semiconductor region is provided on the first semiconductor region. The third semiconductor region is provided on the second semiconductor region. The insulating portion are arranged with a portion of the first semiconductor region, and the second and third semiconductor regions. The conductive portion is provided inside the insulating portion and arranged with the first semiconductor region. The gate electrode is provided inside the insulating portion and arranged with the second semiconductor region. The second electrode is provided on the third semiconductor region and electrically connected to the third semiconductor region.

Semiconductor device and method for manufacturing the same

According to one embodiment, a semiconductor device includes first, second, and third conductive members, a semiconductor member, and a first insulating member. The semiconductor member includes a first semiconductor region provided on the first conductive member, a second semiconductor region provided on a portion of the first semiconductor region, and a third semiconductor region provided on the second semiconductor region. An impurity concentration in the third semiconductor region is greater than in the first semiconductor region. The second conductive member includes a first conductive portion electrically connected to the second and third semiconductor regions. The third conductive member is provided on an other portion of the first semiconductor region. At least a portion of the first insulating member is between the semiconductor member and the third conductive member. The at least a portion of the first insulating member electrically insulates between the semiconductor member and the third conductive member.

Semiconductor device and manufacturing method for the same

According to one embodiment, a semiconductor device includes a first electrode, first and third semiconductor regions of a first conductivity type, second and fourth semiconductor regions of a second conductivity type, a gate electrode and a second electrode. The third semiconductor region is disposed on one portion of the second semiconductor region. The fourth semiconductor region is disposed on another portion of the second semiconductor region, is positioned below the third semiconductor region. The second electrode includes first and second portions separated from each other and allowing the fourth semiconductor region to be positioned therebetween, and the third portion disposed on the first and second portions and arranged with the third semiconductor region. The first, second, and third portions are in contact with the fourth semiconductor region.

Trench-gate MOS transistor and method for manufacturing

A semiconductor device includes a semiconductor body; first and second electrodes provided on back and front surfaces of the semiconductor body, respectively; a third electrode provided on the front surface; and a control electrode disposed inside a trench on the front surface side, and electrically connected to the third electrode. The third electrode is electrically insulated from the semiconductor body and the second electrode. The control electrode is placed between the semiconductor body and the second electrode, and is electrically insulated from the semiconductor body and the second electrode. The control electrode continuously extends inside the trench without branching. The control electrode includes first and second portions. The first portion extends in a first direction parallel to the front surface of the semiconductor body, and the second portion extends in a second direction parallel to the front surface of the semiconductor body and crossing the first direction.

A semiconductor device includes a first semiconductor region of a first conductivity type, a second semiconductor region of a second conductivity type provided on the first semiconductor region, a third semiconductor region of the first conductivity type provided on the second semiconductor region, a first insulating part provided in the first semiconductor region, a first electrode provided in the first semiconductor region, the first insulating part disposed between the first electrode and the first semiconductor region, a second insulating part provided on the first electrode, a gate electrode provided on the second insulating part, a gate insulating part provided between the gate electrode and the second semiconductor region, and a second electrode provided on the second semiconductor region and on the third semiconductor region, and is electrically connected to the second semiconductor region, the third semiconductor region, and the first electrode.

Method of manufacturing a semiconductor device

A semiconductor device includes a semiconductor body, first and second electrodes, and first and second control electrodes. The first and second electrodes are provided on the semiconductor body. The first and second control electrodes each include a first portion positioned between the semiconductor body and the first electrode, a second portion positioned between the semiconductor body and the second electrode, and a third portion linked to the first and second portions. The semiconductor body includes first to fourth semiconductor layers. The second semiconductor layer is provided on the first semiconductor layer, and extends along the first to third portions. The fourth semiconductor layer is provided selectively on the second semiconductor layer, and extends along the second and third portions. The fourth semiconductor layer includes second conductivity-type impurities with a higher concentration than a concentration of second conductivity-type impurities in the second semiconductor layer.

According to an embodiment, a semiconductor device includes a first electrode, a first semiconductor region, second semiconductor regions, third semiconductor regions, a first conductive portion, a gate electrode, and a second electrode. The gate electrode includes a first electrode portion and a second electrode portion. The first electrode portion opposes a portion of the first semiconductor region, one of the second semiconductor regions, and one of the third semiconductors in a first direction perpendicular to a second direction. The second electrode portion is located between the first electrode portion and another one of the third semiconductor regions in the first direction. The second electrode portion opposes another portion of the first semiconductor region, another one of the second semiconductor regions, and the other one of the third semiconductor regions. A second insulating portion including a void is provided between the first electrode portion and the second electrode portion.

According to one embodiment, a semiconductor device includes a first semiconductor region of a first conductivity type, a second semiconductor region of a second conductivity type, a third semiconductor region of the first conductivity type, a gate electrode, and a conductive portion. The second semiconductor region is provided on the first semiconductor region. The third semiconductor region is provided on the second semiconductor region. The gate electrode opposes, in a second direction with a gate insulating layer interposed, the third semiconductor region, the second semiconductor region, and the first semiconductor region. The second direction is perpendicular to a first direction from the second semiconductor region toward the third semiconductor region. The conductive portion includes first and second portions. The first and second portions are respectively arranged with the second and third semiconductor regions. A length of the first portion is longer than a length of the second portion.

Semiconductor device having a varying length conductive portion between semiconductor regions

A semiconductor device includes a first electrode, a first semiconductor layer on the first electrode, a second semiconductor layer on the first semiconductor layer, a third semiconductor layer on the second semiconductor layer, a second electrode in electrical contact with the third semiconductor layer, a gate electrode, a first insulating film between the side surface of the third semiconductor layer and the gate electrode, a field plate electrode, and a second insulating film. The field plate has an upper portion adjacent to the gate electrode and a lower portion having a width less than a width of the upper portion. The second insulating film has a first portion between the field plate electrode's upper portion and the first semiconductor layer and a second portion between the field plate electrode's lower portion and the first semiconductor layer, the second portion having a width greater than the width of the first portion.

Growing community of inventors

Hakusan Ishikawa, Japan

Toshifumi Nishiguchi