Other

Sony Corporation

Jeol Ltd.

Toshiaki Miyokawa

Yuichi Aki

Setsuo Norioka

Naoki Date

Jun Sasaki

Minoru Takeda

Seiichi Nakagawa

Tadashi Hattori

Yoshihisa Miura

Tetsuo Abe

Kouki Okawauchi

Hironori Fujita

A testing apparatus using a scanning electron microscope for enabling tests and measurements on any part of a test subject in a nondestructive way without being limited by a size of the test subject, which is, a testing apparatususing a scanning electron microscope for performing tests and measurements on any part of a test subject in a nondestructive way by using a scanning electron microscope, comprising a local vacuum formation portionfor forming a local vacuum region by blocking around a part to be tested of the test subject from the outside air, wherein the local vacuum formation portion comprises an exhaust portion for exhausting to form a partial vacuum region, a float meansfor floating the whole local vacuum formation portion above the test subject by emitting a compressed gas to an outer circumference portion of the local vacuum formation portion and a length measuring meansfor measuring a distance between the test subject and the local vacuum formation portion for controlling floating of the local vacuum formation portion by the float means.

Testing apparatus using scanning electron microscope

An electron beam irradiation system for shooting an electron beam at a master disk to make recordings. This system is capable of focusing the beam easily and accurately in a corresponding manner to the master disk, thus permitting accurate recordings. The system has a support mechanism portion holding the master disk on it. The support mechanism portion has a slide table on which a focusing stage is placed. The focusing stage has a knife edge and a Faraday cup. The knife edge is located immediately beside the master disk. When recordings are made, an electron beam is first shot at the focusing stage and brought to focus. Then, the beam is shot at the master disk, thus making recordings.

System and method for electron beam irradiation

There is disclosed a field emission electron gun comprising a field emission tip, an extraction electrode for producing an electric field that extracts electrons from the tip, and an accelerating electrode for accelerating the electrons extracted by the extraction electrode. The extraction electrode is inclined to a plane perpendicular to the optical axis of the beam of the electrons and shaped like an inverted cone. The surface of the accelerating electrode which faces the extraction electrode is inclined in the same manner as the extraction electrode. A recess that faces the extraction electrode is formed in the center of the accelerating electrode. The ratio of the voltage V.sub.0 applied to the accelerating electrode to the voltage V.sub.1 applied to the extraction electrode, i.e., V.sub.0 /V.sub.1, can be varied over a wide range while maintaining the virtual source within the virtual image region.

Field emission electron gun

Growing community of inventors

Tokyo, Japan

Toshiaki Miyokawa