Mitsubishi Electric Corporation

Hitachi High-tech Corporation

Shiseido Company, Limited

Netcomsec Co.ltd

Shimizu Construction Co., Ltd.

Toru Ito

Toshihiro Tanaka

Masahito Mori

Yutaka Saito

Takanori Sato

Yuichiro Nakamura

Yasushi Watanabe

Masahiro Tanaka

Fumiaki Tsuchiya

Haruyuki Hasegawa

Yukiko Hirano

Kenta Nakajima

Yasukazu Nakamura

Yoshihiro Orito

Satohiro Hirano

Yoshiyuki Hisamatsu

Takao Ishibashi

Hideo Nakajima

Takafumi Komori

Fumiyoshi Ofuji

Tadamitsu Kanekiyo

A plasma processing method for uniformly removing a processing target film in a lateral direction even when a depth of a trench is increased, in particular, a method for plasma-etching a tungsten film of a stacked film formed by alternately stacking an insulating film and the tungsten film. The method includes: a first depositing step of depositing a film; a first etching step of etching after the first depositing step; a second depositing step of depositing a film; a second etching step of etching using a mixed gas after the second depositing step; and a third etching step of etching after the second etching step, the second depositing step being performed after the first depositing step and the first etching step are repeated a predetermined number of times, and the second depositing step, the second etching step, and the third etching step are repeated a predetermined number of times.

Plasma processing method

Provided is a plasma processing method for selectively removing, after plasma etching using a mask having an amorphous carbon film containing boron, the amorphous carbon film using plasma from a silicon nitride film, a silicon oxide film or a tungsten film. The plasma processing method includes a removing step of removing the amorphous carbon film using plasma generated by mixed gas of Ogas and CHF gas, or CHFgas.

Plasma processing method and plasma ashing apparatus

Servomotor

Without using any drawing command of a commercially available OS or library, screen information that will be screen elements has preliminarily been registered in a screen information database, and based on a touch position information detected by a touch position detecting section, a request control of a display screen or generation of a plant operation information is executed, as well as a registered screen information is fetched from the screen information database to generate a display screen and a process data of a plant that is linked to the display screen is read via a network.

Plant monitoring control system

Spectrophotometer

Auto-sampler for chromatograph

A method for creating and an apparatus for creating a four-dimensional or higher table. A dimension number m and an order n are set, and a permutation of a symbol of n elements and a selecting sequence in accordance with this permutation are determined and set. When one of the n symbols is set as an array element at table position, this setting is started from a first position of all reference axes, and is successively performed to a final position of all the reference axes, and at each position, a symbol unique to each axis direction is selected in the selecting sequence, and at each position of the table, the substitution of a selectable symbol lower in the selecting sequence than the symbol of the determined array element at a position one before an arbitrary position is performed and selection determination is continued.

Creation method of table, creation apparatus, creation program and program storage medium

The secrecy security of coded data can be improved markedly by making it possible to freely vary, within a plurality of natural numbers, the values as the result of coding and decoding operations by a converter using a feedback coding method. As a digital information secrecy security system, the proposed coding method employs a feedback coding method, wherein a Latin square composed of a plurality of natural numbers is used for operation in a converter component of coder and decoder. An initial value IV is set for each of coder and decoder. A preceding coded signal is used as a feedback signal and a feedforward signal for enabling natural numbers to be used as the result of coding, thereby markedly improving the secrecy security of coded signal.

Apparatus and method for maintaining and transmitting secret contents of a signal

A concrete filled steel tube column which includes: a steel tube connected to beams of a structure so that an axial compressive load is transferred from the beams to the steel tube; and a concrete core, disposed within the steel tube, for bearing an axial compressive load transferred from the beams via the steel tube to the concrete core. The steel tube has a plurality of prestressed tube pieces concentrically joined in series. Each of these tube pieces has an axial prestress introduced into it to counteract a stress resulting from the compressive load applied to the steel tube. With this arrangement, substantially no axial stress is induced in the steel tube. In constructing the column, a steel tube piece is erected, and beams are joined to the tube piece. An axial tensile load is applied to the tube piece so that an axial stress is induced in the tube piece. After the application of the load, concrete is charged into the tube piece. After the concrete is cured, the tensile load is released from the tube piece so that the concrete core is subjected to an axial compression as a reaction to the application of an axial tension to the tube piece. Another tube piece is coaxially joined to an upper end of the concrete filled tube piece. Thereafter, the above-mentioned steps from the beam-joining step to the tube piece-joining step are repeated a plurality of times.

Concrete filled steel tube column and method of constructing same

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Tokyo, Japan

Toru Ito