Obducat Ab

Obducat Aktiebolag

Torbjörn Ling

Babak Heidari

Lars Montelius

Marc Beck

Matthias Keil

Method for manufacturing a mold tool (), devised for forming a structured nanoscale pattern on an object () and having a layer () which is anti-adhesive with regard to the object (). A stamp blank () is provided with a structured pattern () on a surface (). The patterned surface () is coated with a layer () of a metal, which has a stable oxidation number and can form a mechanically stable oxide film. The metal layer () is oxidized for forming of an oxide film (). The oxide film () is exposed to a reagent comprising molecule chains (), each of which has a linkage group () which bonds to the oxide film () by chemical bonding, wherein the molecule chains () either at the outset comprise at least a group () comprising fluorine, or in a subsequent step is provided with at least one such group ().

Mold for nano imprinting

A stamp for use in transferring a pattern in nano-scale has a monomolecular antisticking layer. The anti-sticking layer comprises molecular chains, which are covalently bound to the surface of the stamp and which each comprise at least one fluorine-containing group. Each molecular chain contains a group Q, which comprises a bond which is weaker than the other bonds in the molecular chain as well as the covalent bond that binds the molecular chain to the surface of the stamp. Splitting of said bond in the group Q creates a group Q1, which is attached to the part of the molecular chain being left on the surface of the stamp and which is capable of reacting with a fluorine-containing compound to restore the antisticking layer. In a method of manufacturing a stamp for use in transferring a pattern in nanoscale, the stamp is provided with the above-mentioned molecular chain. In a method of repairing a damaged antisticking layer of the above-mentioned stamp, the stamp is treated with a repairing reagent, which has a coupling end, which is capable of reacting with the group Q1, and a fluorine-containing group located at the other end of the repairing reagent.

Stamp having an antisticking layer and a method of forming of repairing such a stamp

A metal mold for use in a nano-imprinting process comprises a firmly adhering monomolecular non-sticking layer. The layer was obtained by subjecting the mold to a reaction with a fluoroalkyl compound having a mercapto group. As a result of said reaction, the layer comprises an organic sulfide of said metal.

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Lund, Sweden

Torbjörn Ling