Average Co-Inventor Count = 2.40
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,317 patents)
2 patents:
1. 11923211 - Correction data creating method, substrate processing method, and substrate processing system
2. 11019285 - Calibration method of infrared camera and calibration system of infrared camera