Novellus Systems Incorporated

Other

Tom Yu

Jeffrey A Tobin

Jean Qing Lu

Randy L Hendrickson

Daniel R Juliano

Alexander Dulkin

Anil Justin Vijayendran

Linda Lee Stenzel

Methods of depositing thin seed layers that improve continuity of the seed layer as well as adhesion to the barrier layer are provided. According to various embodiments, the methods involve performing an etchback operation in the seed deposition chamber prior to depositing the seed layer. The etch step removes barrier layer overhang and/or oxide that has formed on the barrier layer. It some embodiments, a small deposition flux of seed atoms accompanies the sputter etch flux of argon ions, embedding metal atoms into the barrier layer. The embedded metal atoms create nucleation sites for subsequent seed layer deposition, thereby promoting continuous seed layer film growth, film stability and improved seed layer-barrier layer adhesion.

Deposition of thin continuous PVD seed layers having improved adhesion to the barrier layer

A PVD system comprises a hollow cathode magnetron with a downstream plasma control mechanism. The magnetron has a hollow cathode with a non-planar target and at least one electromagnetic coil to generate and maintain a plasma within the cathode. The magnetron also has an anode located between the cathode and a downstream plasma control mechanism. The control mechanism comprises a first, second and third electromagnetic coil beneath a mouth of the target, vertically spaced so as to form a tapered magnetic convergent lens between the target mouth and a pedestal of the magnetron.

Apparatus and method for improving film uniformity in a physical vapor deposition system

A PVD system comprises a hollow cathode magnetron with a capability of producing a high magnetic field for PVD and a low magnetic field for pasting. The high magnetic field is used for PVD and causes an optimal uniform film to form on a substrate but redeposits some metals onto a top portion of a target within the magnetron. The low magnetic field erodes redeposited materials from a top portion of a target within the magnetron.

Apparatus and method for reducing redeposition in a physical vapor deposition system

Apparatus and method for coating lower surfaces of paper sheets with lacquer and drying the sheets include fans for simultaneously drying the sheets and for forcing the sheets upwardly against the lower surface of spaced-apart moving conveyer belts. The streams of air produced by the fans are directed upwardly against the paper sheets and against and through the conveyer belts, and the paper sheets are moved from a first location to a second location within the apparatus. Features provide for washing and cleaning the apparatus and for circulating the lacquer to keep the lacquer in a uniform mixed state.

Apparatus and method for coating and drying paper sheets

A space-saving apparatus and method for coating paper sheets with lacquer and drying the sheets with streams of air are provided. The sheets are coated with lacquer and are moved by parallel and spaced apart conveyer belts in a first direction as the sheets are dried and supported by streams of air that are directed against the paper sheets and against and through the undersides of the conveyer belts. The movement of the paper sheets is then reversed to a second direction and the dried sheets are collected above the conveyer belts as they move in the second direction.

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San Leandro, CA, United States of America

Tom Yu