Average Co-Inventor Count = 3.00
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Intel Corporation (3 from 54,664 patents)
3 patents:
1. 7615462 - Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack
2. 7148565 - Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack
3. 6645832 - Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack