Maxim Integrated Products, Inc.

Tom K Castro

Marco A Zuniga

Adam Brand

Badredin Fatemizadeh

Rajwinder Singh

John Xia

Chi-Nung Ni

Min Xu

A lateral double-diffused metal-oxide-semiconductor transistor includes a silicon semiconductor structure and a vertical gate. The vertical gate include a (a) gate conductor extending from a first outer surface of the silicon semiconductor structure into the silicon semiconductor structure and (b) a gate dielectric layer including a least three dielectric sections. Each of the at least three dielectric sections separates the gate conductor from the silicon semiconductor structure by a respective separation distance, where each of the respective separation distances is different from each other of the respective separation distances.

LDMOS transistors including vertical gates with multiple dielectric sections, and associated methods

A lateral double-diffused metal-oxide-semiconductor (LDMOS) transistor includes a silicon semiconductor structure and a vertical gate. The vertical gate includes (a) a first gate conductor and a second gate conductor each extending from a first outer surface of the silicon semiconductor structure into the silicon semiconductor structure in a thickness direction, (b) a first separation dielectric layer separating the first gate conductor from the second gate conductor within the vertical gate, and (c) a gate dielectric layer separating each of the first gate conductor and the second gate conductor from the silicon semiconductor structure.

Transistors with dual gate conductors, and associated methods

A dual-gate, self-aligned lateral double-diffused metal-oxide-semiconductor (LDMOS) transistor includes a silicon semiconductor structure, a lateral gate including a first dielectric layer and a first conductive layer stacked on the silicon semiconductor structure in a thickness direction, and a vertical gate. The vertical gate includes a second dielectric layer and a second conductive layer disposed in a trench of the silicon semiconductor structure, the second dielectric layer defining an edge of the lateral gate in a lateral direction. A method for forming a dual-gate, self-aligned LDMOS transistor includes (a) forming a vertical gate of the LDMOS transistor in a trench of a silicon semiconductor structure and (b) defining a lateral edge of a lateral gate of the LDMOS transistor using the vertical gate.

Self-aligned, dual-gate LDMOS transistors and associated methods

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Tom K Castro