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Max-Planck-Gesellschaft Zur F&#xf6;rderung Der Wissenschaften E. V.

Timo Stuffler

Gregor Eugen Morfill

Uwe Konopka

Hubertus M Thomas

Noriyoshi Sato

Tetsuji Shimizu

Wolfgang Jacob

Beatrice Annaratone

Martin Fink

Hubertus Thomas

Gregor Morfill

A method for the operation of a plasma device () is described in which particles () are arranged in a plasma, wherein a generation of electric travelling waves () is provided, under whose effective action the particles () in the plasma device () perform a directed movement to at least one pre-determined collection area (A). A plasma device for carrying out the method is also described.

Method and device for the operation of a plasma device

A process for manipulating particles distributed substantially non-uniformly in a plasma of a carrier or reaction gas, wherein Coulomb interaction between the particles is so low that the particles substantially do not form a plasmacrystalline state, and the particles are exposed in a location-selective manner to external adjustment forces and/or the plasma conditions are subjected to a location-selective change to apply at least a portion of the particles onto a substrate surface mask-free and/or subject it to a location-selective plasma treatment in the carrier or reaction gas.

Device for specific particle manipulation and deposition

Procedure and device for specific particle manipulation and deposition

In a method for manipulating particles arranged in a plasma-cristalline state in a plasma of a carrier gas, the particles are at least partially subject to plasma treatment and/or applied to a substrate surface. A device for manipulating of particles in plasma-cristalline state includes a reaction vessel, in which plasma electrodes and at least one substrate are situated. An adaptive electrode for formation of a location selective low frequency or static electrical field in the reaction vessel is described.

Particle manipulation

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Seefeld, Germany

Timo Stuffler