Varian Associates, Inc.

Tienyu Terry Sheng

David L Chapek

Michael William Kissick

Susan Benjamin Felch

Shamim Muhammad Malik

An apparatus for improving dose uniformity in the PLAsma Doping (PLAD) ion implantation of a target material is described. By providing means for simultaneously biasing both the electrode, upon which the target is disposed, and a separately biasable concentric structure introduced about the electrode and sufficiently close to the target, together with means for adjustable bias variation between the electrode and the structure one can sufficiently adjust the shape of the implantation plasma, e.g. induced electric field and plasma sheath thickness, in order to effectively provide a uniform dose distribution during PLAD ion implantation processes.

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San Jose, CA, United States of America

Tienyu Terry Sheng