Taiwan Semiconductor Manufacturing Comp. Ltd.

Tien-Chun Wang

Mei-Yun Wang

Fu-Kai Yang

Chia-Der Chang

Yi-Chun Lo

Hung-Chang Hsu

Guo-Chiang Chi

Chia-Ping Lo

A method for forming a semiconductor device is provided. The method includes providing a semiconductor substrate, a metal gate stack, and an insulating layer formed over the semiconductor substrate. A source region and a drain region are formed in the semiconductor substrate. The metal gate stack is between the source region and the drain region. The insulating layer surrounds the metal gate stack. The method includes forming contact openings passing through the insulating layer to expose the source region and the drain region, respectively. The method includes performing a first pre-amorphized implantation process to form amorphous regions in the source region and the drain region exposed by the contact openings. The method includes after the first pre-amorphized implantation process, forming a dielectric spacer liner layer over sidewalls of the contact openings. The dielectric spacer liner layer has holes exposing portions of the amorphous regions, respectively.

Mechanism for forming metal gate structure

Embodiments of mechanisms for forming a semiconductor device are provided. The semiconductor device includes a semiconductor substrate. A source region and a drain region are formed in the semiconductor substrate, and metal silicide regions are formed in the source region and the drain region, respectively. The semiconductor device further includes a metal gate stack formed over the semiconductor substrate and between the source region and the drain region. The semiconductor device also includes an insulating layer formed over the semiconductor substrate and surrounding the metal gate stack, wherein the insulating layer has contact openings exposing the metal silicide regions, respectively. The semiconductor device includes a dielectric spacer liner layer formed over inner walls of the contact openings, wherein the whole of the dielectric spacer liner layer is right above the metal silicide regions. The semiconductor device includes contact plugs formed in the contact openings.

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Hsinchu, Taiwan

Tien-Chun Wang