Bruker Nano Gmbh

Thomas Schwager

Daniel Radu Goran

The present invention refers to a method of processing an energy-dispersive X-ray (EDX)/X-ray fluorescence (XRF) map (), comprising selecting a data point (dp) among a plurality of data points of the EDX/XRF map (), wherein each of the data points comprise a local measured value (m) and a local dispersion value (v) of a measured variable; determine a first modified mean value (M[]) based on the local measured value (m) of the selected data point (dp) and the local measured value of at least one neighboring data point neighboring the selected data point (dp) and determine a first modified dispersion value (V[]) based on the local dispersion value (v) of the selected data point (dp) and the dispersion value of the at least one neighboring data point, when m<th, and replace the local measured value (m) of the selected data point (dp) by the first modified mean value (M[]), when M[]>TH[

Method of processing an EDX/XRF map and a corresponding image processing device

A method for improving the quality/integrity of an EBSD/TKD map, wherein each data point is assigned to a corresponding grid point of a sample grid and represents crystal information based on a Kikuchi pattern detected for the grid point; comprising determining a defective data point of the EBSD/TKD map and a plurality of non-defective neighboring data points, comparing the position of Kikuchi bands of a Kikuchi pattern detected for a grid point corresponding to the defective data point with the positions of bands in at least one simulated Kikuchi pattern corresponding to crystal information of the neighboring data points and assigning the defective data point the crystal information of one of the plurality of neighboring data point based on the comparison.

Method for improving an EBSD/TKD map

The present invention refers to a method for improving a Transmission Kikuchi Diffraction, TKD pattern, wherein the method comprises the steps of: Detecting a TKD pattern () of a sample () in an electron microscope () comprising at least one active electron lens () focusing an electron beam () in z-direction on a sample () positioned in distance D below the electron lens (), the detected TKD () pattern comprising a plurality of image points x, yand mapping each of the detected image points x, yto an image point of an improved TKD pattern () with the coordinates x, yby using and inverting generalized terms of the form x=&#x3b3;*A+(1&#x2212;&#x3b3;)*B and y=&#x3b3;*C+(1&#x2212;&#x3b3;)*D wherein with Z being an extension in the z-direction of a cylindrically symmetric magnetic field Bof the electron lens (), and wherein A, B, C, D are trigonometric expressions depending on the coordinates x, y, with B and D defining a rotation around a symmetry axis of the magnetic field B, and with A and C defining a combined rotation and contraction operation with respect to the symmetry axis of the magnetic field B. The invention further relates to a measurement system, computer program and computer-readable medium for carrying out the method of the invention.

Method for improving transmission Kikuchi diffraction pattern

Methods and arrangements identify crystalline phases in a polycrystalline sample by determining a normalized vector p(i) for the chemical composition of the expected crystal structure, at each measurement point of the sample, recording a spectrum by means of energy-dispersive X-ray spectroscopy and determining the chemical composition, and recording an electron diffraction image and determining of the diffraction bands. The methods and arrangements also determine a normalized vector v for the chemical composition, compare the normalized vector v with each of the normalized vectors p(i) of the expected crystal structures and outputting an evaluation factor s(i) for the similarity of the vectors in each case, compare the diffraction bands with those of the expected crystal structures and outputting an evaluation factor n(i), and determining an overall quality from the two evaluation factors and identifying the crystal structure with the highest overall quality as belonging to the measurement point.

Method and arrangement for identifying crystalline phases, a corresponding computer program, and a corresponding computer-readable storage medium

According to the invention a method is provided for identifying a crystallographic candidate phase of a crystal in an EBSD diffraction pattern, which includes the following steps: Sorting and indexing of the bands of the diffraction pattern in order of decreasing intensity. Providing of indices of the diffraction bands of candidate phases, which are to be expected as a result of the EBSD pattern acquisition, in a database, wherein all the indices provided can, in each case, be assigned to a candidate phase. Identification of the expected bands with the bands measured in the diffraction pattern for each candidate phase. Comparison of the intensities of bands of the measured diffraction pattern with intensities which were predicted for the diffraction bands of the candidate phases, which are to be expected as a result of the EBSD pattern acquisition, the indices of said candidate phases being stored in the database. In addition, a corresponding computer program and a computer-readable storage medium are provided, on which a computer program according to the invention is stored.

Growing community of inventors

Berlin, Germany

Thomas Schwager