Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten

Balzers Patent Und Beteiligungs Ag

Thaddaus Kraus

The vacuum evaporation apparatus comprises a housing having walls defining n evacuable evaporation chamber with an evaporator in the chamber disposed below a supporting structure for the substance to be coated and including an annular screen disposed around the evaporator between the evaporator and the walls of the housing so that only an opening or angle between the evaporator and the supporting structure is left which is sufficient for the vapor deposition of the substrates. The screen is of a material which may be heated, such as a metal material, which may be electrically heated.

Vacuum evaporation apparatus

A method of producing a high vacuum in a vacuum container which has an exst connection line connected thereto and using an interior protective covering for the walls of the container and a protective gas comprises, applying covering to the interior of the container so as to shield the inner walls thereof and to also shield the exhaust connection thereto, directing a protective gas into the space between the covering the interior walls of the container, preferably during the flooding in which the container is opened, and thereafter evacuating the interior of the container through the exhaust connection and heating the covering. The vacuum treatment device, such as a device for evaporating materials from vapor deposition, comprises a closed container having interior walls with a thin-walled metal sheet forming a covering arranged in spaced relationship to the interior walls so as to shield a major area of the walls and to define a space between the walls and the covering. A connecting line for introducing a protective gas into the container in the space between the walls and the covering is provided, and in addition an exhaust gas line is connected to the container and to an evacuating pump for evacuating the container. A thin-walled metal screen is arranged in the container and shields at least a portion of the exhaust line, and heater means are provided for heating both the covering and the shield.

Fluid protective wall cover in a vapor deposition chamber

A method of producing a high vacuum in a container which has limiting walls hich define a reaction chamber which is adapted to be evacuated for vacuum processing purposes, and in which gases are sorbed during vacuum operation and the gases are removed subsequently by increasing the temperature of the walls and evacuating the chamber at the same time includes heating the reaction chamber, sensing the underpressure in the reaction chamber and controlling the heating of the chamber in accordance with the sensed pressure in a manner such that the underpressure remains within a preselected upper and lower limit value until a predetermined temperature of the walls is attained.

Method of producing a high vacuum in a container

A method for determining the quantity ratio of two components of a multi-substance mixture whose absorption bands are adjacent to each other and overlap comprises using an interference filter which is rotated in a uniform rotation about a first axis through the filter plane which forms with a perpendicular erected on the filter plane a fixed angle .beta. which is not equal to zero. The filter is rotatably arranged about a second axis through the filter plane and the method is characterized by adjusting the angle .alpha. which the axis of rotation forms with the ray in the range of .beta. is less than .alpha. so that a signal corresponding to the first derivative of the spectral intensity distribution of the radiation transmitted by the substance mixture just passes through zero and a quantity correlated with this angle is used as a measure of the quantity ratio. The radiation modulator for determining the quantity ratio includes a housing having an opening for the passage of the light ray therethrough and a filter in the housing in the path of the beam. The filter is mounted for rotation about a first axis comprising the axis of the filter and is mounted for pivoting about a second axis also going through the filter. The first axis is such that the area normal thereof forms with the first axis a fixed angle .beta. and the first axis is rotatable about the second axis and an angle .alpha. is formed between the first axis in the ray direction which may be read and indicated and the filter is adjustable to vary the angle.

Method and apparatus for determining the quantity ratio of two

A pump for the treatment of gases with a sorbent material in an evacuated chamber comprises a housing which has a plurality of stacked plates which define a continuous upwardly extending path for the sorbent material which is made up of successive spirals. At least some of the spirals are spaced vertically apart to define a sorption zone permitting the passage of gases to be treated over the sorbent material. In addition the stacked plates also define a closed path in the housing leading from the sorption zone and out of the housing for discharing desorbed gases. The housing is vibrated by a vibration drive applied to effect upward movement of the sorbent material and a downcomer pipe or return pipe extends through the plates for returning the sorbent material from the upper portion of the path back to the location of the bottom of the sorbent material path. The sorbent material is continuously moved upwardly through the housing on the plates by vibrating the housing to effect such movement. Gases are circulated over the sorbent material for their treatment as the sorbent material is moved upwardly along the path and subsequently returned back to the lower portion of the path.

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Triesen, Liechtenstein

Thaddaus Kraus