Nanowave, Inc.

Tetsuo Ohara

An interferometer in which the path length of the reference beam, measured in wavelengths, is continuously changing in sinusoidal fashion and the interference signal created by combining the measurement beam and the reference beam is processed in real time to obtain the physical distance along the measurement beam between the measured surface and a spatial reference frame such as the beam splitter. The processing involves analyzing the Fourier series of the intensity signal at one or more optical detectors in real time and using the time-domain multi-frequency harmonic signals to extract the phase information independently at each pixel position of one or more optical detectors and converting the phase information to distance information.

Interferometer with continuously varying path length measured in wavelengths to the reference mirror

An improved method of and apparatus for real-time continual nanometer scale position measurement by beam probing as by laser beams and the like, both fixed and oscillating or scanning, over an atomic and other undulating surface such as gratings or the like, relatively moving with respect to the probing beams; and providing, where desired, increased detection speeds, improved positioning sensing response, freedom from or relaxed requirements of strict control on probing oscillation amplitude, and multi-dimensional position measurement with focused beam probes and the like.

METHOD OF AND APPARATUS FOR REAL-TIME CONTINUAL NANOMETER SCALE POSITION MEASUREMENT BY BEAM PROBING AS BY LASER BEAMS AND THE LIKE OF ATOMIC AND OTHER UNDULATING SURFACES SUCH AS GRATINGS OR THE LIKE RELATIVELY MOVING WITH RESPECT TO THE PROBING BEAMS

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North Andover, MA, United States of America

Tetsuo Ohara