National Cheng-Kung University

Tan-Ju Wang

Fan-Tien Cheng

Chin-Yi Lin

Yu-Ming Hsieh

Li-Hsuan Peng

A virtual metrology method using a convolutional neural network (CNN) is provided. In this method, a dynamic time warping (DTW) algorithm is used to delete unsimilar sets of process data, and adjust the sets of process data to be of the same length, thereby enabling the CNN to be used for virtual metrology. A virtual metrology model of the embodiments of the present invention includes several CNN models and a conjecture model, in which plural inputs of the CNN model are sets of time sequence data of respective parameters, and plural outputs of the CNN models are inputs to the conjecture model.

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Tainan, Taiwan

Tan-Ju Wang