Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Other (1 from 832,912 patents)
2. Hitachi-Kokusai Electric Inc. (1 from 1,258 patents)
3. Adtec Plasma Technology Co., Ltd. (1 from 6 patents)
1 patent:
1. 7514377 - Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device