Sii Nanotechnology Inc.

Shizuoka University

Takuya Nakaue

Masatoshi Yasutake

Osamu Takaoka

Kazutoshi Watanabe

Atsushi Uemoto

Naoya Watanabe

Yoshiteru Shikakura

Futoshi Iwata

Syuichi Kikuchi

There is a micro-machining apparatus for removing the micro-machining dust generated at the time of machining while a workpiece M is machined within a liquid W using a probe tip. The apparatus includes a stage on which the workpiece is to be placed; a probe having the probe tip, a machining device having a moving means that moves the stage and the probe relative to each other to machine the workpiece by the probe tip, and a micro-machining dust removing device having a first electrode and a second electrode that are arranged in the liquid so as to sandwich the probe tip therebetween, and a voltage application means that applies a voltage to between both the electrodes to move the micro-machining dust in the liquid.

Micro-machining dust removing device, micro-machining apparatus, and micro-machining dust removing method

The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.

Working method using scanning probe

Growing community of inventors

Chiba, Japan

Takuya Nakaue